scholarly journals Ion-Beam Deposition/Etching Using EMIM-N(CN)2 Ionic Liquid Ion Source

2015 ◽  
Vol 40 (2) ◽  
pp. 87-90 ◽  
Author(s):  
Mitsuaki Takeuchi ◽  
Yuki Hoshide ◽  
Takuya Hamaguchi ◽  
Hiromichi Ryuto ◽  
Gikan H. Takaoka
Keyword(s):  
Ionic Liquid ◽  
Ion Beam ◽  
Ion Source ◽  
Ion Beam Deposition ◽  
Beam Deposition

Low‐energy (5

1995 ◽  
Vol 13 (6) ◽  
pp. 2836-2842 ◽  
Author(s):  
Y.‐W. Kim ◽  
I. Petrov ◽  
H. Ito ◽  
J. E. Greene
Keyword(s):  
Ion Beam ◽  
Ultrahigh Vacuum ◽  
Ion Source ◽  
Low Energy ◽  
High Brightness ◽  
Ion Beam Deposition ◽  
Beam Deposition

Composite Nanowires from Ion Beam Modification of Si Nanowires

1999 ◽  
Vol 581 ◽  
Author(s):  
X. T. Zhou ◽  
H. Y. Peng ◽  
N. G. Shang ◽  
N. Wang ◽  
I. Bello ◽  
...  
Keyword(s):  
Reaction Pathway ◽  
Ion Beam ◽  
Ion Source ◽  
Low Energy ◽  
Hydrogen Ions ◽  
Si Nanowires ◽  
Interacting Particles ◽  
Ion Beam Modification ◽  
Ion Beam Deposition ◽  
Beam Deposition

ABSTRACTComposite nanowires with typical diameters of 30-100nm, which consisted of Si, β-SiC, amorphous carbon were converted from Si nanowires by ion beam deposition. The Si nanorods were exposed to broad low energy ion beams. The low energy hydrocarbon, argon and hydrogen ions, generated in a Kaufman ion source, reacted with Si nanowires and formed the composite nanowires. It has been assumed that the reaction pathway to form the composite nanowires were driven by both thermal diffusion and kinetic energic of interacting particles.

scholarly journals Low-energy mass-selected ion beam deposition of silicon carbide with Bernas-type ion source using methylsilane

AIP Advances ◽  
2019 ◽  
Vol 9 (9) ◽  
pp. 095051 ◽  
Author(s):  
Satoru Yoshimura ◽  
Satoshi Sugimoto ◽  
Takae Takeuchi ◽  
Kensuke Murai ◽  
Masato Kiuchi
Keyword(s):  
Silicon Carbide ◽  
Ion Beam ◽  
Ion Source ◽  
Low Energy ◽  
Ion Beam Deposition ◽  
Beam Deposition

Direct ion-beam deposition of Ag nanoparticles using a solid-state silver ion source

Vacuum ◽  
2021 ◽  
Vol 183 ◽  
pp. 109846
Author(s):  
Wenbin Zuo ◽  
Vasiliy Pelenovich ◽  
Alexander Tolstogouzov ◽  
Rui Zhang ◽  
Xiaomei Zeng ◽  
...  
Keyword(s):  
Solid State ◽  
Ag Nanoparticles ◽  
Ion Beam ◽  
Ion Source ◽  
Silver Ion ◽  
Ion Beam Deposition ◽  
Beam Deposition
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