scholarly journals Maskless lithography for versatile and low cost fabrication of polymer based micro optical structures

OSA Continuum ◽  
2020 ◽  
Vol 3 (10) ◽  
pp. 2808 ◽  
Author(s):  
Muhammad Shaukat Khan ◽  
Roland lachmayer ◽  
Bernhard Roth
Author(s):  
G.A. Cirino ◽  
S.A. Lopera ◽  
L.G. Neto ◽  
A.N. Montagnoli ◽  
R.D. Mansano

2010 ◽  
Vol 146-147 ◽  
pp. 143-146 ◽  
Author(s):  
Xiao Wei Guo ◽  
Qi Ming Dong

A low-cost microfabrication tool based on digital mirror device(DMD) is presented in this paper. The imaging principle of the system is described and the fabrication methods for binary and nonbinary micro optical elements(MOE) are also discussed in detail. It is expected to provide an understanding of MOEs fabrication using DMD-based maskless lithography technique.


2005 ◽  
Author(s):  
Henry I. Smith ◽  
Rajesh Menon ◽  
Amil Patel ◽  
David Chao ◽  
Michael Walsh ◽  
...  

2012 ◽  
Author(s):  
G. A. Cirino ◽  
S. A. Lopera ◽  
A. N. Montagnoli ◽  
L. G. Neto ◽  
R. D. Mansano

2013 ◽  
Vol 552 ◽  
pp. 207-213 ◽  
Author(s):  
Ke Jun Zhong ◽  
Yi Qing Gao ◽  
Feng Li

Largely owing to the high cost of masks for lithography, recently there is a strong interest in maskless lithography. Maskless lithography is a potential program to overcome the high cost caused by rising price of the masks. Because of the advantages of low cost, high flexibility and short production cycle, digital mirror device (DMD)-based maskless lithography has been brought storm attention by people. Both the theory and experiment of DMD-based maskless lithography achieved good results. Maskless lithography systems based on DMD are analyzed in this review. Principles of construction, examples of implication, as well as future development direction are discussed.


2019 ◽  
Vol 4 (3) ◽  
pp. 735-746 ◽  
Author(s):  
John A. Hondred ◽  
Igor L. Medintz ◽  
Jonathan C. Claussen

Advances in solution-phase graphene patterning has provided a facile route for rapid, low-cost and scalable manufacturing of electrochemical devices, even on flexible substrates.


Author(s):  
Y. L. Chen ◽  
S. Fujlshiro

Metastable beta titanium alloys have been known to have numerous advantages such as cold formability, high strength, good fracture resistance, deep hardenability, and cost effectiveness. Very high strength is obtainable by precipitation of the hexagonal alpha phase in a bcc beta matrix in these alloys. Precipitation hardening in the metastable beta alloys may also result from the formation of transition phases such as omega phase. Ti-15-3 (Ti-15V- 3Cr-3Al-3Sn) has been developed recently by TIMET and USAF for low cost sheet metal applications. The purpose of the present study was to examine the aging characteristics in this alloy.The composition of the as-received material is: 14.7 V, 3.14 Cr, 3.05 Al, 2.26 Sn, and 0.145 Fe. The beta transus temperature as determined by optical metallographic method was about 770°C. Specimen coupons were prepared from a mill-annealed 1.2 mm thick sheet, and solution treated at 827°C for 2 hr in argon, then water quenched. Aging was also done in argon at temperatures ranging from 316 to 616°C for various times.


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