scholarly journals Mapping electron-beam-injected trapped charge with scattering scanning near-field optical microscopy

2016 ◽  
Vol 41 (5) ◽  
pp. 1046 ◽  
Author(s):  
Denis E. Tranca ◽  
Emilio Sánchez-Ortiga ◽  
Genaro Saavedra ◽  
Manuel Martínez-Corral ◽  
Syed A. M. Tofail ◽  
...  
Keyword(s):  
Electron Beam ◽  
Optical Microscopy ◽  
Near Field ◽  
Trapped Charge

Investigation of Die Tilting of Packages with Single and Multi-chips

2018 ◽  
Author(s):  
Lo Chea Wee ◽  
Tan Sze Yee ◽  
Gan Sue Yin ◽  
Goh Cin Sheng
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Electron Beam ◽  
Optical Microscopy ◽  
Device Performance ◽  
Electronic Components ◽  
Area Of Interest ◽  
On Chip ◽  
Scanning Electron

Abstract Advanced package technology often includes multi-chips in one package to accommodate the technology demand on size & functionality. Die tilting leads to poor device performance for all kinds of multi-chip packages such as chip by chip (CbC), chip on chip (CoC), and the package with both CbC and CoC. Traditional die tilting measured by optical microscopy and scanning electron microscopy has capability issue due to wave or electron beam blocking at area of interest by electronic components nearby. In this paper, the feasibility of using profilemeter to investigate die tilting in single and multi-chips is demonstrated. Our results validate that the profilemeter is the most profound metrology for die tilting analysis especially on multi-chip packages, and can achieve an accuracy of <2μm comparable to SEM.

Tip-Enhanced Near-Field Optical Microscopy of Quasi-1 D Nanostructures

ChemPhysChem ◽  
2011 ◽  
Vol 13 (4) ◽  
pp. 927-929 ◽  
Author(s):  
Miriam Böhmler ◽  
Achim Hartschuh
Keyword(s):  
Optical Microscopy ◽  
Near Field

scholarly journals Compensating for artifacts in scanning near-field optical microscopy due to electrostatics

APL Photonics ◽  
2021 ◽  
Vol 6 (3) ◽  
pp. 036102
Author(s):  
Tobias Nörenberg ◽  
Lukas Wehmeier ◽  
Denny Lang ◽  
Susanne C. Kehr ◽  
Lukas M. Eng
Keyword(s):  
Optical Microscopy ◽  
Near Field

Gold-coated parabolic tapers for scanning near-field optical microscopy: fabrication and optimisation

1995 ◽  
Vol 61 (1-4) ◽  
pp. 155-163 ◽  
Author(s):  
Maria Garcia-Parajo ◽  
Tom Tate ◽  
Yong Chen
Keyword(s):  
Optical Microscopy ◽  
Near Field

Raman imaging with near‐field scanning optical microscopy

1995 ◽  
Vol 67 (17) ◽  
pp. 2483-2485 ◽  
Author(s):  
C. L. Jahncke ◽  
M. A. Paesler ◽  
H. D. Hallen
Keyword(s):  
Optical Microscopy ◽  
Near Field ◽  
Raman Imaging ◽  
Scanning Optical Microscopy ◽  
Near Field Scanning
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