scholarly journals Fast heuristic-based source mask optimization for EUV lithography using dual edge evolution and partial sampling

2021 ◽  
Author(s):  
Sikun Li ◽  
Zinan Zhang ◽  
Xiangzhao Wang ◽  
Wei Cheng
Keyword(s):  
Euv Lithography ◽  
Partial Sampling

Status of the liquid-xenon-jet laser-plasma source for EUV lithography

2002 ◽  
Author(s):  
Bjoern A. M. Hansson ◽  
Lars Rymell ◽  
Magnus Berglund ◽  
Oscar E. Hemberg ◽  
Emmanuelle Janin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Xenon ◽  
Euv Lithography

Toward the In Situ Remediation of Carbon Deposition on Ru-Capped Multilayer Mirrors Intended for EUV Lithography:  Exploiting the Electron-Induced Chemistry

2007 ◽  
Vol 111 (33) ◽  
pp. 12165-12168 ◽  
Author(s):  
David J. Davis ◽  
Georgios Kyriakou ◽  
Robert B. Grant ◽  
Mintcho S. Tikhov ◽  
Richard M. Lambert
Keyword(s):  
Carbon Deposition ◽  
In Situ Remediation ◽  
Multilayer Mirrors ◽  
Euv Lithography

Lithographic performance and optimization of chemically amplified single-layer resists for EUV lithography

2000 ◽  
Author(s):  
Takeo Watanabe ◽  
Hiroo Kinoshita ◽  
Atsushi Miyafuji ◽  
Shigeo Irie ◽  
Shigeru Shirayone ◽  
...  
Keyword(s):  
Single Layer ◽  
Chemically Amplified ◽  
Euv Lithography

Efficient multi-die placement for blank defect mitigation in EUV lithography

2012 ◽  
Author(s):  
Yuelin Du ◽  
Hongbo Zhang ◽  
Martin D. F. Wong ◽  
Yunfei Deng ◽  
Rasit O. Topaloglu
Keyword(s):  
Euv Lithography

Development of laser-produced plasma-based EUV light source technology for HVM EUV lithography

2012 ◽  
Author(s):  
Junichi Fujimoto ◽  
Tsukasa Hori ◽  
Tatsuya Yanagida ◽  
Takeshi Ohta ◽  
Yasufumi Kawasuji ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Limited Sampling of Radical Prostatectomy Specimens With Excellent Preservation of Prognostic Parameters of Prostate Cancer

2009 ◽  
Vol 133 (8) ◽  
pp. 1278-1284
Author(s):  
Kyungeun Kim ◽  
Pil June Pak ◽  
Jae Y. Ro ◽  
Dongik Shin ◽  
Soo-Jin Huh ◽  
...  
Keyword(s):  
Prostate Cancer ◽  
Radical Prostatectomy ◽  
Sampling Method ◽  
Resection Margin ◽  
Gleason Grade ◽  
Posterior Half ◽  
Margin Involvement ◽  
Partial Sampling ◽  
Prostate Cancers ◽  
Extraprostatic Extension

Abstract Context.—The widespread use of the serum prostate-specific antigen test has increased the early detection of prostate cancer and consequently reduced grossly definable prostate cancers. Objective.—To find the most efficient gross sampling method for radical prostatectomy specimens not only preserving important prognostic factors but also being cost effective. Design.—We initially analyzed clinicopathologic features of the entire prostate sections from 148 radical prostatectomy specimens, which then were used to examine the impact of 5 partial sampling methods on tumor stage, Gleason score, extraprostatic extension, resection margin status, and paraffin block numbers. The methods included submission of (1) alternative slices, (2) alternative slices plus biopsy-positive posterior quarters, (3) every posterior half, (4) every posterior half plus one midanterior half, and (5) alternative slices plus peripheral 3-mm rim of the remaining prostate. Results.—Prostate cancers and their extraprostatic extension and resection margin involvement were commonly located in the right posterior portion of the prostate. Method 5 was most efficient, detecting all cases with extraprostatic extension and resection margin involvement and reducing 25% of paraffin blocks compared with the entire sampling of the prostate. The Gleason scores were retained in most of cases, except reversal of the primary and secondary Gleason grade component in only 2 cases (1%). Only 4 cases (3%) were downstaged within the same T2 stage. Conclusions.—These results demonstrate that sampling of alternative slices plus peripheral rim of the remaining prostate is the most efficient partial sampling method for radical prostatectomy specimens.

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