scholarly journals Determination of refractive index and layer thickness of nm-thin films via ellipsometry

2017 ◽  
Vol 25 (22) ◽  
pp. 27077 ◽  
Author(s):  
Peter Nestler ◽  
Christiane A. Helm
Keyword(s):  
Thin Films ◽  
Refractive Index ◽  
Layer Thickness

Determination of thin film refractive index and thickness by means of film phase thickness

Open Physics ◽  
2008 ◽  
Vol 6 (2) ◽  
Author(s):  
Milen Nenkov ◽  
Tamara Pencheva
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Refractive Index ◽  
Barium Titanate ◽  
Spectral Region ◽  
Complex Refractive Index ◽  
Refractive Index Dispersion ◽  
New Approach ◽  
Phase Thickness

AbstractA new approach for determination of refractive index dispersion n(λ) (the real part of the complex refractive index) and thickness d of thin films of negligible absorption and weak dispersion is proposed. The calculation procedure is based on determination of the phase thickness of the film in the spectral region of measured transmittance data. All points of measured spectra are included in the calculations. Barium titanate thin films are investigated in the spectral region 0.38–0.78 μm and their n(λ) and d are calculated. The approach is validated using Swanepoel’s method and it is found to be applicable for relatively thin films when measured transmittance spectra have one minimum and one maximum only.

Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation

2013 ◽  
Vol 43 (12) ◽  
pp. 1149-1153 ◽  
Author(s):  
V I Sokolov ◽  
N V Marusin ◽  
V Ya Panchenko ◽  
A G Savelyev ◽  
V N Seminogov ◽  
...  
Keyword(s):  
Thin Films ◽  
Refractive Index ◽  
Extinction Coefficient ◽  
Waveguide Mode ◽  
Mode Excitation

Model for Rapid Reverse Determination of the Refractive Index Bulk Inhomogeneity of Thin Films at Oblique Incidence

2016 ◽  
Vol 36 (1) ◽  
pp. 0131001
Author(s):  
简钰东 Jian Yudong ◽  
汤建勋 Tang Jianxun ◽  
吴素勇 Wu Suyong ◽  
谭中奇 Tan Zhongqi
Keyword(s):  
Thin Films ◽  
Refractive Index ◽  
Oblique Incidence
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