scholarly journals Surface topography acquisition method for double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry

2017 ◽  
Vol 25 (20) ◽  
pp. 24148 ◽  
Author(s):  
Tao Zhang ◽  
Feng Gao ◽  
Xiangqian Jiang
1998 ◽  
Author(s):  
Ichirou Yamaguchi ◽  
Akihiro Yamamoto ◽  
Masaru Yano

2011 ◽  
Vol 325 ◽  
pp. 508-513 ◽  
Author(s):  
Peng Zhang ◽  
Bo Wang ◽  
Mark J. Jackson ◽  
Xing Mao

Current requirements for producing highly precise and ultra-smooth micro structured surfaces of small parts are proposed in certain situations. The following question arises: how to make a highly precise and ultra-smooth micro-structured surface with high efficiency and low cost? Novel desktop lapping and polishing devices should be developed to satisfy these requirements. In order to improve the surface topography and remove the surface damaged layer of a highly precise and ultra-smooth micro thin-walled structure after milling with the width of 150 μm and the depth of 10 μm, a novel lapping desktop device is designed and developed. There are two key points in the design of the lapping desktop device: one is the vertical coupled macro-micro movement axis; the other is the fixture with a thin and flexible hinge structure, which has the capability of measuring both force and displacement as a double-feedback sensor to control both the micro lapping force and the depth of lapping. The experimental results show that the surface topography of the micro thin-walled structured surface is much improved after lapping, and that the three-dimensional surface roughness decreased from 329 nm to 82.2 nm.


Author(s):  
Michael Nosonovsky ◽  
Bharat Bhushan

Surface patterns affect wetting properties of solid materials allowing manipulation of the phase state of an adjacent fluid. The best known example of this effect is the superhydrophobic composite (Cassie–Baxter) interface with vapour/air pockets between the solid and liquid. Mathematically, the effect of surface micropatterns can be studied by an averaging technique similarly to the method of separation of motions in dynamics. However, averaged parameters are insufficient for robust superhydrophobic and superoleophobic surfaces because additional topography features are important: hierarchical organization and re-entrant roughness. The latter is crucial for the oleophobicity because it enhances the stability of a composite interface. The re-entrant topography can be achieved by various methods. Understanding the role of re-entrant surface topography gives us new insights on the multitude of wetting scenarios beyond the standard Wenzel and Cassie–Baxter models. This article is part of the themed issue ‘Bioinspired hierarchically structured surfaces for green science’.


Author(s):  
C. T. Nightingale ◽  
S. E. Summers ◽  
T. P. Turnbull

The ease of operation of the scanning electron microscope has insured its wide application in medicine and industry. The micrographs are pictorial representations of surface topography obtained directly from the specimen. The need to replicate is eliminated. The great depth of field and the high resolving power provide far more information than light microscopy.


Author(s):  
P.G. Pawar ◽  
P. Duhamel ◽  
G.W. Monk

A beam of ions of mass greater than a few atomic mass units and with sufficient energy can remove atoms from the surface of a solid material at a useful rate. A system used to achieve this purpose under controlled atmospheres is called an ion miliing machine. An ion milling apparatus presently available as IMMI-III with a IMMIAC was used in this investigation. Unless otherwise stated, all the micro milling operations were done with Ar+ at 6kv using a beam current of 100 μA for each of the two guns, with a specimen tilt of 15° from the horizontal plane.It is fairly well established that ion bombardment of the surface of homogeneous materials can produce surface topography which resembles geological erosional features.


Author(s):  
David C. Joy ◽  
Dennis M. Maher

High-resolution images of the surface topography of solid specimens can be obtained using the low-loss technique of Wells. If the specimen is placed inside a lens of the condenser/objective type, then it has been shown that the lens itself can be used to collect and filter the low-loss electrons. Since the probeforming lenses in TEM instruments fitted with scanning attachments are of this type, low-loss imaging should be possible.High-resolution, low-loss images have been obtained in a JEOL JEM 100B fitted with a scanning attachment and a thermal, fieldemission gun. No modifications were made to the instrument, but a wedge-shaped, specimen holder was made to fit the side-entry, goniometer stage. Thus the specimen is oriented initially at a glancing angle of about 30° to the beam direction. The instrument is set up in the conventional manner for STEM operation with all the lenses, including the projector, excited.


Author(s):  
J.P. Benedict ◽  
Ron Anderson ◽  
S. J. Klepeis

Traditional specimen preparation procedures for non-biological samples, especially cross section preparation procedures, involves subjecting the specimen to ion milling for times ranging from minutes to tens of hours. Long ion milling time produces surface alteration, atomic number and rough-surface topography artifacts, and high temperatures. The introduction of new tools and methods in this laboratory improved our ability to mechanically thin specimens to a point where ion milling time was reduced to one to ten minutes. Very short ion milling times meant that ion milling was more of a cleaning operation than a thinning operation. The preferential thinning and the surface topography that still existed in briefly ion milled samples made the study of interfaces between materials such as platinum silicide and silicon difficult. These two problems can be eliminated by completely eliminating the ion milling step and mechanically polishing the sample to TEM transparency with the procedure outlined in this communication. Previous successful efforts leading to mechanically thinned specimens have shown that problems center on tool tilt control, removal of polishing damage, and specimen cleanliness.


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