TiO_2-Ta_2O_5 composite thin films deposited by radio frequency ion-beam sputtering

2006 ◽  
Vol 45 (36) ◽  
pp. 9125 ◽  
Author(s):  
Cheng-Chung Lee ◽  
Chien-Jen Tang
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Composite Thin Films ◽  
Beam Sputtering

Residual Stress of Rugate Filter made with Ta^2O^5-SiO^2 Composite Thin Films by RF Ion-Beam Sputtering

2007 ◽  
Author(s):  
Chien-Jen Tang ◽  
Cheng-Chung Jaing ◽  
Kuan-Shiang Lee ◽  
Wei-Ting Shen ◽  
Cheng-Chung Lee
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Composite Thin Films ◽  
Beam Sputtering ◽  
Rugate Filter

Rugate filter made with composite thin films by ion-beam sputtering

2006 ◽  
Vol 45 (7) ◽  
pp. 1333 ◽  
Author(s):  
Cheng-Chung Lee ◽  
Chien-Jen Tang ◽  
Jean-Yee Wu
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Composite Thin Films ◽  
Beam Sputtering ◽  
Rugate Filter

Preparation of thin films of (Tb,Dy)Fe2 giant magnetostrictive alloy by ion beam sputtering process.

1996 ◽  
Vol 8 (1/2) ◽  
pp. 27-28
Author(s):  
Mitsuhiro WADA ◽  
Yoshihito MATSUMURA ◽  
Hirohisa UCHIDA ◽  
Haru-Hisa UCHIDA ◽  
Hideo KANEKO
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

scholarly journals Fabrication of the Ln-Ba-Cu-O thin films by ion beam sputtering.

Shinku ◽  
1989 ◽  
Vol 32 (3) ◽  
pp. 259-262
Author(s):  
Tetsuro TAJIMA ◽  
Hajime KUWAHARA ◽  
Kohei OTANI ◽  
Tsutom YOTSUYA ◽  
Yoshihiko SUZUKI ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering
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