Optimization of coating uniformity in a simplerotation system by using rotating shadowmask
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2017 ◽
Vol 106
(4)
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pp. 1075-1084
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Keyword(s):
2019 ◽
pp. 419-450
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2020 ◽
Vol 211
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pp. 115289
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2011 ◽
Vol 287-290
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pp. 2618-2621
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2007 ◽
Vol 42
(1)
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pp. 129-141
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