Vectorial pupil optimization for compensating polarization effect at full exposure field in lithography
2003 ◽
Vol 38
(4)
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pp. 332-343
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Keyword(s):
2017 ◽
Vol 669
◽
pp. 176-180
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1993 ◽
Vol 232
(1)
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pp. 353-360
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Keyword(s):