Multilayer coatings for optics in the extreme ultraviolet

2010 ◽  
Author(s):  
Juan I. Larruquert ◽  
Manuela Vidal-Dasilva ◽  
Sergio García-Cortés ◽  
Luis Rodríguez-de Marcos ◽  
Mónica Fernández-Perea ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coatings

scholarly journals Wavelength selection for multilayer coatings for lithography generation beyond extreme ultraviolet

2012 ◽  
Vol 11 (4) ◽  
pp. 040501 ◽  
Author(s):  
Igor A. Makhotkin ◽  
Erwin Zoethout ◽  
Eric Louis ◽  
Andrei M. Yakunin ◽  
Stephan Müllender ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coatings ◽  
Wavelength Selection ◽  
Selection For

Sub-diffraction-limited multilayer coatings for the 03 numerical aperture micro-exposure tool for extreme ultraviolet lithography

2007 ◽  
Vol 46 (18) ◽  
pp. 3736 ◽  
Author(s):  
Regina Soufli ◽  
Russell M. Hudyma ◽  
Eberhard Spiller ◽  
Eric M. Gullikson ◽  
Mark A. Schmidt ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Numerical Aperture ◽  
Multilayer Coatings ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography

Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm

2017 ◽  
Vol 37 (6) ◽  
pp. 0631001
Author(s):  
张 超 Zhang Chao ◽  
张杰瑞 Zhang Jierui ◽  
王一名 Wang Yiming ◽  
匡尚奇 Kuang Shangqi ◽  
谢 耀 Xie Yao
Keyword(s):  
Evolutionary Algorithm ◽  
Extreme Ultraviolet ◽  
Multilayer Coatings

SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging

2006 ◽  
Vol 45 (8) ◽  
pp. 1765 ◽  
Author(s):  
Benjawan Kjornrattanawanich ◽  
David L. Windt ◽  
John F. Seely ◽  
Yurii A. Uspenskii
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coatings
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