Frequency calibration in the ArF excimer laser-tuning range using laser-induced fluorescence of NO

1991 ◽  
Vol 30 (36) ◽  
pp. 5229 ◽  
Author(s):  
Michel Versluis ◽  
Maarten Ebben ◽  
Marcel Drabbels ◽  
J. J. ter Meulen
Keyword(s):  
Excimer Laser ◽  
Tuning Range ◽  
Laser Induced Fluorescence ◽  
Arf Excimer Laser ◽  
Frequency Calibration ◽  
Laser Tuning

scholarly journals Intracavity C atom absorption in the tuning range of the ArF excimer laser

1992 ◽  
Vol 96 (4) ◽  
pp. 3350-3351 ◽  
Author(s):  
Michel Versluis ◽  
Gerard Meijer
Keyword(s):  
Excimer Laser ◽  
Tuning Range ◽  
Arf Excimer Laser ◽  
Atom Absorption

Laser-induced fluorescence of fused silica irradiated by ArF excimer laser

2011 ◽  
Author(s):  
Qihong Lou ◽  
Haibo Zhang ◽  
Zhijun Yuan ◽  
Jun Zhou
Keyword(s):  
Excimer Laser ◽  
Laser Induced Fluorescence ◽  
Fused Silica ◽  
Arf Excimer Laser

High Resolution Displacement of Functional Groups onto Fluorocarbon Resin Surface by Using ArF Excimer Laser

1996 ◽  
Vol 451 ◽  
Author(s):  
T. Shimizu ◽  
M. Murahara
Keyword(s):  
Contact Angle ◽  
High Resolution ◽  
Laser Beam ◽  
Thin Layer ◽  
Functional Groups ◽  
Excimer Laser ◽  
Laser Fluence ◽  
Large Area ◽  
Three Solutions ◽  
Arf Excimer Laser

ABSTRACTA Fluorocarbon resin surface was selectively modified by irradiation with a ArF laser beam through a thin layer of NaAlO2, B(OH)3, or H2O solution to give a hydrophilic property. As a result, with low fluence, the surface was most effectively modified with the NaAlO2 solution among the three solutions. However, the contact angle in this case changed by 10 degrees as the fluence changed only 1mJ/cm2. When modifying a large area of the surface, high resolution displacement could not be achieved because the laser beam was not uniform in displacing functional groups. Thus, the laser fluence was successfully made uniform by homogenizing the laser beam; the functional groups were replaced on the fluorocarbon resin surface with high resolution, which was successfully modified to be hydrophilic by distributing the laser fluence uniformly.

Sign in / Sign up

Export Citation Format

Share Document