Heavy-ion RBS characterization of multilayer TiNx-SiO2-Si structures
Keyword(s):
Multilayer structures consisting of TiNx-SiO2-Si layers operating as MOS devices were constructed and tested for their electrical properties. RBS measurements were performed for the characterization of the structure of the devices. The results show a correlation between the structure found by RBS and the electrical performance of the devices.
2015 ◽
Vol 821-823
◽
pp. 480-483
◽
Keyword(s):
Keyword(s):
2005 ◽
Vol 483-485
◽
pp. 585-588
◽
1990 ◽
Vol 55
(12)
◽
pp. 2933-2939
◽
2012 ◽
Vol 717-720
◽
pp. 641-644