Deposition of Amorphous Carbon Thin Films by Pulsed RF Plasma CVD

2005 ◽  
Vol 38 (8) ◽  
pp. 593-599 ◽  
Author(s):  
Dong-Sun Kim ◽  
Tae-Won Kang
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Rf Plasma ◽  
Plasma Cvd ◽  
Carbon Thin Films ◽  
Pulsed Rf

Fluorine incorporated amorphous carbon thin films prepared by Surface Wave Microwave Plasma CVD

2008 ◽  
Vol 17 (7-10) ◽  
pp. 1697-1701 ◽  
Author(s):  
Golap Kalita ◽  
Hare Ram Aryal ◽  
Sudip Adhikari ◽  
Dilip C. Ghimire ◽  
Rakesh A. Afre ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Amorphous Carbon ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Carbon Thin Films

Optical and structural properties of amorphous carbon thin films deposited by microwave surface-wave plasma CVD

2006 ◽  
Vol 15 (2-3) ◽  
pp. 188-192 ◽  
Author(s):  
Sudip Adhikari ◽  
Sunil Adhikary ◽  
Ashraf M.M. Omer ◽  
Mohamad Rusop ◽  
Hideo Uchida ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Structural Properties ◽  
Amorphous Carbon ◽  
Plasma Cvd ◽  
Carbon Thin Films

Structural study of device quality silicon germanium thin films deposited by pulsed RF plasma CVD

2009 ◽  
Vol 93 (6-7) ◽  
pp. 1016-1019 ◽  
Author(s):  
Partha Chaudhuri ◽  
Ayana Bhaduri ◽  
Atul Bandyopadhyay ◽  
D.L. Williamson
Keyword(s):  
Thin Films ◽  
Structural Study ◽  
Silicon Germanium ◽  
Rf Plasma ◽  
Plasma Cvd ◽  
Pulsed Rf

Diamond-like carbon thin films prepared by rf-plasma CVD

Vacuum ◽  
1991 ◽  
Vol 42 (16) ◽  
pp. 1058
Author(s):  
Jiang Jie ◽  
Liu Chenzan
Keyword(s):  
Thin Films ◽  
Rf Plasma ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Carbon Thin Films
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