Structural properties of amorphous carbon thin films deposited by LF (100 kHz), RF (13.56 MHz), and pulsed RF (13.56 MHz) plasma CVD

2005 ◽  
Vol 22 (4) ◽  
pp. 639-642 ◽  
Author(s):  
Dong-Sun Kim
Keyword(s):  
Thin Films ◽  
Structural Properties ◽  
Amorphous Carbon ◽  
Plasma Cvd ◽  
Carbon Thin Films ◽  
Pulsed Rf

Optical and structural properties of amorphous carbon thin films deposited by microwave surface-wave plasma CVD

2006 ◽  
Vol 15 (2-3) ◽  
pp. 188-192 ◽  
Author(s):  
Sudip Adhikari ◽  
Sunil Adhikary ◽  
Ashraf M.M. Omer ◽  
Mohamad Rusop ◽  
Hideo Uchida ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Structural Properties ◽  
Amorphous Carbon ◽  
Plasma Cvd ◽  
Carbon Thin Films

Effect of nitrogen addition on the elastic and structural properties of amorphous carbon thin films

2001 ◽  
Vol 389 (1-2) ◽  
pp. 315-320 ◽  
Author(s):  
L. Valentini ◽  
J.M. Kenny ◽  
G. Carlotti ◽  
M. Guerrieri ◽  
G. Signorelli ◽  
...  
Keyword(s):  
Thin Films ◽  
Structural Properties ◽  
Amorphous Carbon ◽  
Nitrogen Addition ◽  
Carbon Thin Films

Fluorine incorporated amorphous carbon thin films prepared by Surface Wave Microwave Plasma CVD

2008 ◽  
Vol 17 (7-10) ◽  
pp. 1697-1701 ◽  
Author(s):  
Golap Kalita ◽  
Hare Ram Aryal ◽  
Sudip Adhikari ◽  
Dilip C. Ghimire ◽  
Rakesh A. Afre ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Amorphous Carbon ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Carbon Thin Films

Characterization of nitrogenated amorphous carbon thin films grown by microwave surface wave plasma CVD

2006 ◽  
Vol 376-377 ◽  
pp. 331-333 ◽  
Author(s):  
Hare Ram Aryal ◽  
Sudip Adhikari ◽  
Ashraf M. M. Omer ◽  
Sunil Adhikary ◽  
Hideo Uchida ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Amorphous Carbon ◽  
Plasma Cvd ◽  
Carbon Thin Films

Optical band gap of nitrogenated amorphous carbon thin films synthesized by microwave surface wave plasma CVD

2008 ◽  
Vol 17 (7-10) ◽  
pp. 1666-1668 ◽  
Author(s):  
Sudip Adhikari ◽  
Hare Ram Aryal ◽  
Dilip Chandra Ghimire ◽  
Golap Kalita ◽  
Masayoshi Umeno
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Band Gap ◽  
Amorphous Carbon ◽  
Optical Band Gap ◽  
Plasma Cvd ◽  
Carbon Thin Films

Influence of argon neutral beam energy on the structural properties of amorphous carbon thin films grown by neutral particle beam assisted sputtering

2011 ◽  
Vol 519 (20) ◽  
pp. 6703-6707 ◽  
Author(s):  
DongHyeok Lee ◽  
JinNyoung Jang ◽  
KwangHo Kwon ◽  
SukJae You ◽  
BonJu Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Structural Properties ◽  
Amorphous Carbon ◽  
Beam Energy ◽  
Neutral Particle ◽  
Particle Beam ◽  
Neutral Beam ◽  
Carbon Thin Films

scholarly journals Synthesis of Sulfur-Doped Amorphous Carbon Thin Films by Plasma CVD Using Thiophene as a Starting Material.

2003 ◽  
Vol 111 (1290) ◽  
pp. 133-136 ◽  
Author(s):  
Takao HIRAIDE ◽  
Akio ONO ◽  
Toru FUSEGI ◽  
Nobutaka TAKEZAWA ◽  
Shin-ichi KURODA ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Starting Material ◽  
Plasma Cvd ◽  
Carbon Thin Films
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