Interface adhesion: Measurement and analysis

2014 ◽  
pp. 9-26
Keyword(s):  
Interface Adhesion ◽  
Adhesion Measurement ◽  
Measurement And Analysis

Adhesion measurement and analysis at cell/encapsulant interface as quality control tools during PV module manufacture

1999 ◽  
Author(s):  
Neelkanth G. Dhere ◽  
Kaustubh S. Gadre ◽  
Nachiket R. Raravikar ◽  
Shashank R. Kulkarni ◽  
Piyush S. Jamkhandi ◽  
...  
Keyword(s):  
Quality Control ◽  
Pv Module ◽  
Adhesion Measurement ◽  
Measurement And Analysis

A Trial for Micro-Scale Evaluation of Adhesion Strength around Cu Metallization Systems

2007 ◽  
Vol 990 ◽  
Author(s):  
Shoji Kamiya ◽  
Hitoshi Arakawa ◽  
Hiroshi Shimomura ◽  
Masaki Omiya
Keyword(s):  
Adhesion Strength ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Interface Adhesion ◽  
Cu Metallization ◽  
Four Point Bending ◽  
Adhesion Measurement ◽  
Cu Film ◽  
Tip Radius

ABSTRACTAdhesion strength of the interface between Cu film and SiCN cap layer for IC metallization system was evaluated by a technique developed by the authors. In this technique, microscopic specimens with the in-plane dimension less than 10 μm were fabricated by focused ion beam system and loaded directly by a sharp diamond stylus with submicron tip radius. By comparing the crack extension behavior with the three-dimensional numerical simulation, the interface adhesion energy was evaluated to be 5 J/m2. The same interface was subjected also to the four-point bending experiment, which is widely applied to interface adhesion measurement. The evaluation results by the two techniques agreed reasonably well with each other.

104 Specimen size effect on interface adhesion measurement for Cu metallization systems in integrated circuits

2011 ◽  
Vol 2011.24 (0) ◽  
pp. 9-11
Author(s):  
Nobuyuki SHISHIDO ◽  
Chuantong CHEN ◽  
Shoji KAMIYA ◽  
Masaki OMIYA ◽  
Hisashi SATO ◽  
...  
Keyword(s):  
Integrated Circuits ◽  
Size Effect ◽  
Specimen Size ◽  
Interface Adhesion ◽  
Cu Metallization ◽  
Adhesion Measurement
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