Four-Point Bending Methodology development for 40nm technology Cu/Nblk interface adhesion measurement

Author(s):  
Y. Wang ◽  
Y. J. Yang ◽  
M. M. Chong ◽  
R. R. Nistala ◽  
X. S. Rao ◽  
...  
2007 ◽  
Vol 990 ◽  
Author(s):  
Shoji Kamiya ◽  
Hitoshi Arakawa ◽  
Hiroshi Shimomura ◽  
Masaki Omiya

ABSTRACTAdhesion strength of the interface between Cu film and SiCN cap layer for IC metallization system was evaluated by a technique developed by the authors. In this technique, microscopic specimens with the in-plane dimension less than 10 μm were fabricated by focused ion beam system and loaded directly by a sharp diamond stylus with submicron tip radius. By comparing the crack extension behavior with the three-dimensional numerical simulation, the interface adhesion energy was evaluated to be 5 J/m2. The same interface was subjected also to the four-point bending experiment, which is widely applied to interface adhesion measurement. The evaluation results by the two techniques agreed reasonably well with each other.


2010 ◽  
Vol 25 (10) ◽  
pp. 1917-1928 ◽  
Author(s):  
Shoji Kamiya ◽  
Hiroshi Shimomura ◽  
Masaki Omiya ◽  
Takashi Suzuki

We developed a new microscale technique for evaluating the local interface adhesion in a thin film stack and we compared it with a conventional four-point bending technique. Using the microscale technique, the interface adhesion was estimated to be 3.0 J/m2 by comparing experimental results with numerical simulation results for interface crack propagation behavior. The four-point bending technique was applied to the same interface and the interface adhesion was estimated to be 4.4 J/m2 by experiment. However, this value is an overestimate because it includes the plastic deformation of epoxy resin used to fabricate the specimens. By eliminating the additional energy dissipated through plastic deformation of the epoxy resin close to the interface crack tip, the interface adhesion was evaluated to be 3.3 J/m2. This value agrees well with that obtained using the microscale technique.


2011 ◽  
Vol 2011.24 (0) ◽  
pp. 9-11
Author(s):  
Nobuyuki SHISHIDO ◽  
Chuantong CHEN ◽  
Shoji KAMIYA ◽  
Masaki OMIYA ◽  
Hisashi SATO ◽  
...  

1977 ◽  
Vol 16 (03) ◽  
pp. 125-130 ◽  
Author(s):  
P. L. Reichertz

Data processing has become an important tool in theoretical and clinical medicine. The main categories of applications are : information analysis, (bio)signal processing and the field of information logistics (information systems).The problems encountered lie in the discrepancy of the basic methods of a formal approach to an empirical science, the complexity of the target system and the system ecology, i.e. the involvement of the user and the system environment during system construction and utilization.Possible solutions to these problems are the application of system techniques, inductive planning, development of medical methodology, development of methods and techniques for user involvement and assessment of motivation and education and educational planning.The necessary general strategy in the development in medical informatics is seen in the continuing systematization of the theoretical and practical approach. It is estimated that this will eventually contribute to the systematization of medical science and practice.


2009 ◽  
Vol 51 (9) ◽  
pp. 580-586 ◽  
Author(s):  
Bernd Oberwinkler ◽  
Martin Riedler ◽  
Heinz Leitner ◽  
Ataollah Javidi

2014 ◽  
Vol 56 (5) ◽  
pp. 369-374
Author(s):  
Aylin Bekem ◽  
Mustafa Dogu ◽  
Zafer Gemici ◽  
Ahmet Unal ◽  
Mehmet Hilmi Guler

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