Effect of Interface Treatment on the Voltage Linearity in 8 fF/μm2 High-k Dielectric and Combination Stacks on Metal Insulator Metal (MIM) Capacitor

2017 ◽  
Vol 10 (4) ◽  
pp. 467-470
Author(s):  
Eunmi Choi ◽  
Areum Kim ◽  
Soon Hyeong Kwon ◽  
Sung Gyu Pyo
Keyword(s):  
Metal Insulator ◽  
High K ◽  
Metal Insulator Metal ◽  
High K Dielectric ◽  
Interface Treatment

(Invited) Metal-Insulator-Metal Devices with High-K Dielectric for Nonvolatile or Dynamic Random Access Memories

2015 ◽  
Vol 67 (1) ◽  
pp. 99-110 ◽  
Author(s):  
A. Bsiesy ◽  
P. Gonon ◽  
C. Vallee ◽  
J. Pointet ◽  
C. Mannequin
Keyword(s):  
Random Access ◽  
Metal Insulator ◽  
High K ◽  
Metal Insulator Metal ◽  
High K Dielectric

Microstructure and chemical analysis of Hf-based high-k dielectric layers in metal–insulator–metal capacitors

2010 ◽  
Vol 518 (15) ◽  
pp. 4467-4472 ◽  
Author(s):  
P. Thangadurai ◽  
V. Mikhelashvili ◽  
G. Eisenstein ◽  
W.D. Kaplan
Keyword(s):  
Chemical Analysis ◽  
Metal Insulator ◽  
Dielectric Layers ◽  
High K ◽  
Metal Insulator Metal ◽  
High K Dielectric

A Substitution for the High- k Dielectric in an AlGaN/GaN Metal-insulator-Semiconductor Heterostructure

2012 ◽  
Vol 29 (5) ◽  
pp. 057702 ◽  
Author(s):  
Yue-Chan Kong ◽  
Fang-Shi Xue ◽  
Jian-Jun Zhou ◽  
Liang Li ◽  
Chen Chen ◽  
...  
Keyword(s):  
Metal Insulator ◽  
Metal Insulator Semiconductor ◽  
Semiconductor Heterostructure ◽  
High K ◽  
High K Dielectric
Sign in / Sign up

Export Citation Format

Share Document