Functionalization of Silicon Crystal Surface by Energetic Cluster Ion Bombardment

2012 ◽  
Vol 12 (12) ◽  
pp. 9136-9141
Author(s):  
Vasily Lavrentiev ◽  
Jiri Vacik ◽  
Alexandr Dejneka ◽  
Lubomir Jastrabik ◽  
Vladimir Vorlicek ◽  
...  
Keyword(s):  
Crystal Surface ◽  
Silicon Crystal ◽  
Ion Bombardment ◽  
Cluster Ion

Borate nonlinear optical single crystal surface finishing by argon cluster ion sputtering

2021 ◽  
pp. 101520
Author(s):  
N.G. Korobeishchikov ◽  
I.V. Nikolaev ◽  
V.V. Atuchin ◽  
I.P. Prosvirin ◽  
A. Tolstogouzov ◽  
...  
Keyword(s):  
Single Crystal ◽  
Nonlinear Optical ◽  
Crystal Surface ◽  
Surface Finishing ◽  
Ion Sputtering ◽  
Single Crystal Surface ◽  
Cluster Ion

Vacancy formation during oxidation of silicon crystal surface

2008 ◽  
Vol 93 (10) ◽  
pp. 101904 ◽  
Author(s):  
M. Suezawa ◽  
Y. Yamamoto ◽  
M. Suemitsu ◽  
N. Usami ◽  
I. Yonenaga
Keyword(s):  
Crystal Surface ◽  
Silicon Crystal ◽  
Vacancy Formation

Gas cluster ion bombardment of GaAs: XPS depth profiles and molecular dynamics modelling

2021 ◽  
Author(s):  
Helen Oppong-Mensah ◽  
Mark A. Baker ◽  
Tim S. Nunney ◽  
Richard G. White ◽  
Jonathon England ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Ion Bombardment ◽  
Depth Profiles ◽  
Cluster Ion ◽  
Dynamics Modelling

Fabrication of a Grating Pattern with Submicrometer Dimension in Silicon Crystal by Ion-Bombardment-Enhanced Etching

1980 ◽  
Vol 19 (3) ◽  
pp. 491-494 ◽  
Author(s):  
Kazuyuki Moriwaki ◽  
Noboru Masuda ◽  
Hiroaki Aritome ◽  
Susumu Namba
Keyword(s):  
Silicon Crystal ◽  
Ion Bombardment ◽  
Grating Pattern

Modification of RbTiOPO 4 (001) crystal surface induced by Ar + ion bombardment: X-ray photoelectron spectroscopy and first-principles studies

Vacuum ◽  
2018 ◽  
Vol 147 ◽  
pp. 38-44 ◽  
Author(s):  
Xiulan Duan ◽  
Jian Liu ◽  
Yang Chen ◽  
Ziqing Li ◽  
Pengfei Zhu ◽  
...  
Keyword(s):  
First Principles ◽  
Photoelectron Spectroscopy ◽  
Crystal Surface ◽  
Ion Bombardment ◽  
X Ray

Decoration of ZnO needles with nanoripples using gas cluster ion bombardment

2020 ◽  
Vol 264 ◽  
pp. 127356 ◽  
Author(s):  
Vasiliy Pelenovich ◽  
Xiaomei Zeng ◽  
Rakhim Rakhimov ◽  
Wenbin Zuo ◽  
Canxin Tian ◽  
...  
Keyword(s):  
Ion Bombardment ◽  
Cluster Ion

Diamond Growth from Sputtered Atomic Carbon and Hydrogen Gas

1992 ◽  
Vol 242 ◽  
Author(s):  
Michael A. Kelly ◽  
Sanjiv Kapoor ◽  
Darin S. Olson ◽  
Stig B. Hagstrom
Keyword(s):  
Crystal Surface ◽  
Silicon Crystal ◽  
Hydrogen Gas ◽  
Diamond Growth ◽  
The Novel ◽  
Graphite Target ◽  
Rotating Platform ◽  
Sem Images ◽  
Diamond Crystals ◽  
Effective Growth

ABSTRACTDiamond thin films were grown on a scratched silicon crystal surface by a novel CVD technique. The heated substrate, mounted on a rotating platform, was exposed to a bombardment of sputtered carbon atoms, from a graphite target in a helium plasma, and subsequently bombarded by atomic hydrogen generated by a hot tungsten filament. The resulting diamond films were characterized by Raman spectroscopy and SEM. The SEM images indicate highly faceted diamond crystals and the Raman spectra show a single narrow peak characteristic of pure diamond with no graphitic component. The effective growth rate is about 0.5 microns per hour of exposure time. The novel sequential CVD reactor is described and possible growth mechanisms are discussed.

Cluster-ion bombardment studies to reveal the amorphization mode in strained Si0.8Ge0.2

2012 ◽  
Vol 92 (11) ◽  
pp. 625-632
Author(s):  
Michael S. Martin ◽  
Di Chen ◽  
Phillip E. Thompson ◽  
Xuemei Wang ◽  
Wei-Kan Chu ◽  
...  
Keyword(s):  
Ion Bombardment ◽  
Cluster Ion
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