High-Performance Bottom-Gate Poly-Si Polysilicon–Oxide–Nitride–Oxide–Silicon Thin Film Transistors Crystallized by Excimer Laser Irradiation for Two-Bit Nonvolatile Memory Applications

2012 ◽  
Vol 12 (7) ◽  
pp. 5318-5324 ◽  
Author(s):  
I-Che Lee ◽  
Hsu-Hang Kuo ◽  
Chun-Chien Tsai ◽  
Chao-Lung Wang ◽  
Po-Yu Yang ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Irradiation ◽  
Thin Film Transistors ◽  
Nonvolatile Memory ◽  
High Performance ◽  
Silicon Thin Film ◽  
Excimer Laser Irradiation ◽  
Memory Applications ◽  
Nitride Oxide ◽  
Bottom Gate

High-Performance Poly-Si Thin Film Transistors Crystallized by Excimer Laser Irradiation with A-Si Spacer Structure

2005 ◽  
Vol 8 (1) ◽  
pp. G14 ◽  
Author(s):  
Ting-Kuo Chang ◽  
Ching-Wei Lin ◽  
Chun-Chien Tsai ◽  
Jian-Hao Lu ◽  
Bo-Ting Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
High Performance ◽  
Excimer Laser Irradiation ◽  
Si Thin Film

Fabrication method for self-aligned bottom-gate oxide thin-film transistors by utilizing backside excimer-laser irradiation through substrate

2013 ◽  
Vol 103 (14) ◽  
pp. 142111 ◽  
Author(s):  
Mitsuru Nakata ◽  
Hiroshi Tsuji ◽  
Yoshihide Fujisaki ◽  
Hiroto Sato ◽  
Yoshiki Nakajima ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Gate Oxide ◽  
Oxide Thin Film ◽  
Fabrication Method ◽  
Excimer Laser Irradiation ◽  
Bottom Gate

High-performance polycrystalline silicon thin-film transistors with oxide–nitride–oxide gate dielectric and multiple nanowire channels

2006 ◽  
Vol 515 (3) ◽  
pp. 1112-1116
Author(s):  
Shih-Ching Chen ◽  
Ting-Chang Chang ◽  
Po-Tsun Liu ◽  
Y.C. Wu ◽  
C.C. Tsai ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Gate Dielectric ◽  
Silicon Thin Film ◽  
Nitride Oxide
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