Study of Nitrogen Diffusion Profile of Low Resistivity Diffusion Barrier by Resputtering Technology
1981 ◽
Vol 128
(9)
◽
pp. 1992-1995
◽
Keyword(s):
2006 ◽
Vol 45
(6A)
◽
pp. 4898-4902
◽
1999 ◽
Vol 38
(Part 1, No. 4B)
◽
pp. 2401-2405
◽
2006 ◽
Vol 45
(1A)
◽
pp. 215-220
◽
1988 ◽
Vol 49
(C4)
◽
pp. C4-453-C4-456
◽
2020 ◽
Vol 25
(3)
◽
pp. 415-423