Preparation of Single-Oriented (111)VN Film with Low-Resistivity and Its Application as Diffusion Barrier between Cu and Si

2006 ◽  
Vol 45 (1A) ◽  
pp. 215-220 ◽  
Author(s):  
Ken-ichi Yoshimoto ◽  
Fumihiro Kaiya ◽  
Satoko Shinkai ◽  
Katsutaka Sasaki ◽  
Hideto Yanagisawa
Keyword(s):  
Diffusion Barrier ◽  
Low Resistivity

Study of Nitrogen Diffusion Profile of Low Resistivity Diffusion Barrier by Resputtering Technology

2009 ◽  
Vol 9 (2) ◽  
pp. 759-763
Author(s):  
Jung-Chih Tsao ◽  
Chuan-Pu Liu ◽  
Ying-Lang Wang ◽  
Kei-Wei Chen
Keyword(s):  
Diffusion Barrier ◽  
Diffusion Profile ◽  
Nitrogen Diffusion ◽  
Low Resistivity

VERY LOW RESISTIVITY AuMn GATE OHMIC CONTACTS FOR GaInAs DIFFUSED JFETs

1988 ◽  
Vol 49 (C4) ◽  
pp. C4-453-C4-456 ◽  
Author(s):  
P. E. HALLALI ◽  
P. BLANCONNIER ◽  
L. BRICARD ◽  
J-C. RENAUD
Keyword(s):  
Ohmic Contacts ◽  
Low Resistivity

Integration of Multi-geophysical Approaches to Identify Potential Pathways of Heavy Metals Contamination - A Case Study in Zeida, Morocco

2020 ◽  
Vol 25 (3) ◽  
pp. 415-423
Author(s):  
Ahmed Lachhab ◽  
El Mehdi Benyassine ◽  
Mohamed Rouai ◽  
Abdelilah Dekayir ◽  
Jean C. Parisot ◽  
...  
Keyword(s):  
Heavy Metals ◽  
Seismic Velocity ◽  
Seismic Refraction ◽  
Geophysical Methods ◽  
Low Frequency ◽  
Electrical Current ◽  
P Wave ◽  
Low Resistivity ◽  
Refraction Tomography ◽  
Geophysical Surveys

The tailings of Zeida's abandoned mine are found near the city of Midelt, in the middle of the high Moulouya watershed between the Middle and the High Atlas of Morocco. The tailings occupy an area of about 100 ha and are stored either in large mining pit lakes with clay-marl substratum or directly on a heavily fractured granite bedrock. The high contents of lead and arsenic in these tailings have transformed them into sources of pollution that disperse by wind, runoff, and seepage to the aquifer through faults and fractures. In this work, the main goal is to identify the pathways of contaminated water with heavy metals and arsenic to the local aquifers, water ponds, and Moulouya River. For this reason, geophysical surveys including electrical resistivity tomography (ERT), seismic refraction tomography (SRT) and very low-frequency electromagnetic (VLF-EM) methods were carried out over the tailings, and directly on the substratum outside the tailings. The result obtained from combining these methods has shown that pollutants were funneled through fractures, faults, and subsurface paleochannels and contaminated the hydrological system connecting groundwater, ponds, and the river. The ERT profiles have successfully shown the location of fractures, some of which extend throughout the upper formation to depths reaching the granite. The ERT was not successful in identifying fractures directly beneath the tailings due to their low resistivity which inhibits electrical current from propagating deeper. The seismic refraction surveys have provided valuable details on the local geology, and clearly identified the thickness of the tailings and explicitly marked the boundary between the Triassic formation and the granite. It also aided in the identification of paleochannels. The tailings materials were easily identified by both their low resistivity and low P-wave velocity values. Also, both resistivity and seismic velocity values rapidly increased beneath the tailings due to the compaction of the material and lack of moisture and have proven to be effective in identifying the upper limit of the granite. Faults were found to lie along the bottom of paleochannels, which suggest that the locations of these channels were caused by these same faults. The VLF-EM surveys have shown tilt angle anomalies over fractured areas which were also evinced by low resistivity area in ERT profiles. Finally, this study showed that the three geophysical methods were complementary and in good agreement in revealing the pathways of contamination from the tailings to the local aquifer, nearby ponds and Moulouya River.

Effect of a Ti-capped and Ti-mediated Layer on Co Silicide Formation

2002 ◽  
Vol 716 ◽  
Author(s):  
G.Z. Pan ◽  
E.W. Chang ◽  
Y. Rahmat-Samii
Keyword(s):  
Electron Diffraction ◽  
Sheet Resistance ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Diffusion Barrier ◽  
Silicide Formation ◽  
Plan View ◽  
Processing Window

AbstractWe comparatively studied the formation of ultra thin Co silicides, Co2Si, CoSi and CoSi2, with/without a Ti-capped and Ti-mediated layer by using rapid thermal annealing in a N2 ambient. Four-point-probe sheet resistance measurements and plan-view electron diffraction were used to characterize the silicides as well as the epitaxial characteristics of CoSi2 with Si. We found that the formation of the Co silicides and their existing duration are strongly influenced by the presence of a Ti-capped and Ti-mediated layer. A Ti-capped layer promotes significantly CoSi formation but suppresses Co2Si, and delays CoSi2, which advantageously increases the silicidation-processing window. A Ti-mediated layer acting as a diffusion barrier to the supply of Co suppresses the formation of both Co2Si and CoSi but energetically favors directly forming CoSi2. Plan-view electron diffraction studies indicated that both a Ti-capped and Ti-mediated layer could be used to form ultra thin epitaxial CoSi2 silicide.

Atomistic Simulation Study of Controlled Nanostructure Patterning

2003 ◽  
Vol 775 ◽  
Author(s):  
Byeongchan Lee ◽  
Kyeongjae Cho
Keyword(s):  
Diffusion Barrier ◽  
Atomistic Simulation ◽  
Degrees Of Freedom ◽  
Embedded Atom Method ◽  
Surface Kinetics ◽  
Bulk Properties ◽  
Embedded Atom ◽  
Kinetics Of ◽  
Dissociation Barrier ◽  
Strain Dependent

AbstractWe investigate the surface kinetics of Pt using the extended embedded-atom method, an extension of the embedded-atom method with additional degrees of freedom to include the nonbulk data from lower-coordinated systems as well as the bulk properties. The surface energies of the clean Pt (111) and Pt (100) surfaces are found to be 0.13 eV and 0.147 eV respectively, in excellent agreement with experiment. The Pt on Pt (111) adatom diffusion barrier is found to be 0.38 eV and predicted to be strongly strain-dependent, indicating that, in the compressive domain, adatoms are unstable and the diffusion barrier is lower; the nucleation occurs in the tensile domain. In addition, the dissociation barrier from the dimer configuration is found to be 0.82 eV. Therefore, we expect that atoms, once coalesced, are unlikely to dissociate into single adatoms. This essentially tells that by changing the applied strain, we can control the patterning of nanostructures on the metal surface.

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