scholarly journals The Potential of Reactively RF Sputtered ZnO Thin Films for the Fabrication of Microwave Filters

2000 ◽  
Vol 23 (2) ◽  
pp. 75-95
Author(s):  
A. T. Kollias ◽  
E. D. Tsamis ◽  
J. N. Avaritsiotis
Keyword(s):  
Thin Films ◽  
Quality Factor ◽  
Crystallographic Orientation ◽  
Piezoelectric Properties ◽  
Microwave Filters ◽  
Zno Thin Films ◽  
Silicon Substrates ◽  
Temperature Drift ◽  
Deposition Conditions

The piezoelectric properties of reactively sputtered ZnO thin films deposited on glass and silicon substrates were studied in order to assess their potential for the construction of RF overmoded filters. Films of high crystallographic orientation {002}, as shown by XRD measurements and SEM observations, and high value ofkeff2, calculated with the aid of the BVD model, were obtained after the optimization of the deposition conditions, with highly repetitive properties. Simple devices were designed and constructed on silicon substrates which showed a quality factor of 1000 without the use of a Bragg acoustic reflector, and a temperature drift of –30ppm/℃.

Control of Nanostructure and Crystallographic Orientation in Electrodeposited ZnO Thin Films via Structure Directing Agents

2014 ◽  
Vol 161 (5) ◽  
pp. D195-D201 ◽  
Author(s):  
Keigo Ichinose ◽  
Tomoaki Mizuno ◽  
Matthew Schuette White ◽  
Tsukasa Yoshida
Keyword(s):  
Thin Films ◽  
Crystallographic Orientation ◽  
Zno Thin Films ◽  
Structure Directing Agents

scholarly journals Advanced determination of piezoelectric properties of AlN thin films on silicon substrates

2008 ◽  
Author(s):  
J.L. Sanchez-Rojas ◽  
J. Hernando ◽  
A. Ababneh ◽  
U. Schmid ◽  
J. Olivares ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties ◽  
Silicon Substrates

Structural and piezoelectric properties of pulsed laser deposited ZnO thin films

2006 ◽  
Vol 39 (1-4) ◽  
pp. 366-375 ◽  
Author(s):  
M. Benetti ◽  
D. Cannatá ◽  
F. Di Pietrantonio ◽  
E. Verona ◽  
P. Verardi ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties ◽  
Pulsed Laser ◽  
Zno Thin Films

Optical Properties of Nanostructured Zinc Oxides Deposited on Silicon Substrates

2011 ◽  
Vol 312-315 ◽  
pp. 1132-1136 ◽  
Author(s):  
Mohamad Hafiz Mamat ◽  
Zuraida Khusaimi ◽  
Mohamad Mahmood Rusop
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Spin Coating ◽  
Sol Gel ◽  
Zno Thin Films ◽  
Silicon Substrates ◽  
Annealing Temperatures ◽  
Uv Emission ◽  
Zinc Oxides ◽  
Optically Transparent

Nanostructured zinc oxide (ZnO) thin films were prepared through sol-gel method and spin-coating technique. ZnO thin films then were annealed at temperature of 350°C, 400°C, 450°C and 500°C. The thin films were characterized using field emission scanning electron microscope (FESEM), UV-VIS-NIR spectrophotometer and photoluminescence (PL) spectrofluorometer for morphology and optical properties study. The morphology study indicates that the particle size of ZnO increased with annealing temperatures. All thin films are optically transparent (~ 80 % in transmittance) in the visible light-NIR region. PL spectra reveal improved UV emission with annealing temperatures up to 500°C.

Effect of Electroless Copper on the Growth of ZnO Nanowires

2005 ◽  
Vol 20 (9) ◽  
pp. 2348-2353 ◽  
Author(s):  
Wen-Ting Chiou ◽  
Wan-Yu Wu ◽  
Jyh-Ming Ting
Keyword(s):  
Thin Films ◽  
Deposition Time ◽  
Average Length ◽  
Average Diameter ◽  
Sputter Deposition ◽  
Zno Nanowires ◽  
Zno Thin Films ◽  
Silicon Substrates ◽  
Reactive Sputter Deposition ◽  
Electroless Copper

ZnO nanowires along with ZnO thin films were obtained on copper-metallized silicon substrates using an radio frequency-reactive sputter-deposition technique. Residual tensile stresses were found in both the copper layer and the ZnO layer. The ZnO nanowires were observed exclusively at the grain boundaries of the ZnO thin films. The average diameter of ZnO nanowires varies only slightly with the ZnO deposition time, while the average length increases linearly with the ZnO deposition time. Based on the observations a growth model involving stress-assisted diffusion of copper and reaction-controlled catalytic growth of ZnO nanowires is suggested.

Study of the structure, optical properties, surface morphology and topology of ZnO thin films grown by sol–gel on silicon substrates

2014 ◽  
Vol 1 (3) ◽  
pp. 036404 ◽  
Author(s):  
J G Quiñones-Galván ◽  
H Tototzintle-Huitle ◽  
L A Hernández-Hernández ◽  
J S Arias-Cerón ◽  
F de Moure-Flores ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Surface Morphology ◽  
Sol Gel ◽  
Zno Thin Films ◽  
Silicon Substrates ◽  
And Topology

scholarly journals Postannealing Effect at Various Gas Ambients on Ohmic Contacts of Pt/ZnO Nanobilayers toward Ultraviolet Photodetectors

2013 ◽  
Vol 2013 ◽  
pp. 1-9 ◽  
Author(s):  
Chung-Hua Chao ◽  
Mao-Yi Chen ◽  
Chii-Ruey Lin ◽  
Yueh-Chung Yu ◽  
Yeong-Der Yao ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Flow ◽  
Ohmic Contacts ◽  
Chemical Vapor ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Films ◽  
Flow Rate Ratio ◽  
Silicon Substrates ◽  
Pt Electrode ◽  
Ultraviolet Photodetectors

This paper describes a fabrication and characterization of ultraviolet (UV) photodetectors based on Ohmic contacts using Pt electrode onto the epitaxial ZnO (0002) thin film. Plasma enhanced chemical vapor deposition (PECVD) system was employed to deposit ZnO (0002) thin films onto silicon substrates, and radio-frequency (RF) magnetron sputtering was used to deposit Pt top electrode onto the ZnO thin films. The as-deposited Pt/ZnO nanobilayer samples were then annealed at450∘Cin two different ambients (argon and nitrogen) to obtain optimal Ohmic contacts. The crystal structure, surface morphology, optical properties, and wettability of ZnO thin films were analyzed by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM), photoluminescence (PL), UV-Vis-NIR spectrophotometer, and contact angle meter, respectively. Moreover, the photoconductivity of the Pt/ZnO nanobilayers was also investigated for UV photodetector application. The above results showed that the optimum ZnO sample was synthesized with gas flow rate ratio of 1 : 3 diethylzinc [DEZn, Zn(C2H5)2] to carbon dioxide (CO2) and then combined with Pt electrode annealed at450∘Cin argon ambient, exhibiting good crystallinity as well as UV photo responsibility.

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