Effects of deposition conditions on the structural and acoustic characteristics of (1120) ZnO thin films on R-sapphire substrates

2012 ◽  
Vol 59 (8) ◽  
pp. 1613-1617 ◽  
Author(s):  
Yan Wang ◽  
Kiyotaka Wasa ◽  
Shu-yi Zhang
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Acoustic Characteristics ◽  
Sapphire Substrates ◽  
Deposition Conditions

Epitaxial growth of NH3-doped ZnO thin films on 〈〉 oriented sapphire substrates

2003 ◽  
Vol 255 (3-4) ◽  
pp. 293-297 ◽  
Author(s):  
Jinzhong Wang ◽  
Guotong Du ◽  
Baijun Zhao ◽  
Xiaotian Yang ◽  
Yuantao Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Epitaxial Growth ◽  
Zno Thin Films ◽  
Sapphire Substrates ◽  
Doped Zno

Nanoindentation ‘pop-in’ phenomenon in epitaxial ZnO thin films on sapphire substrates

2008 ◽  
Vol 59 (4) ◽  
pp. 359-364 ◽  
Author(s):  
R. Navamathavan ◽  
Seong-Ju Park ◽  
Jun-Hee Hahn ◽  
Chi Kyu Choi
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Sapphire Substrates

Effect of Different Substrate Temperature on Phosphorus-Doped ZnO Thin Films Prepared by PLD on Sapphire Substrates

2009 ◽  
Vol 26 (5) ◽  
pp. 057305 ◽  
Author(s):  
Zhao Zi-Wen ◽  
Hu Li-Zhong ◽  
Zhang He-Qiu ◽  
Sun Jing-Chang ◽  
Bian Ji-Ming ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Zno Thin Films ◽  
Sapphire Substrates ◽  
Doped Zno ◽  
Phosphorus Doped

Thermal conductivity of hetero-epitaxial ZnO thin films on c- and r-plane sapphire substrates: Thickness and grain size effect

2019 ◽  
Vol 125 (3) ◽  
pp. 035101 ◽  
Author(s):  
Yuichiro Yamashita ◽  
Kaho Honda ◽  
Takashi Yagi ◽  
Junjun Jia ◽  
Naoyuki Taketoshi ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Grain Size ◽  
Size Effect ◽  
Zno Thin Films ◽  
Grain Size Effect ◽  
Sapphire Substrates

Work Function Effects of Nano Structured ZnO Thin Film on the Acetone Gas Sensitivity

2009 ◽  
Vol 1174 ◽  
Author(s):  
Seung Hyun Jee ◽  
Nitul Kakati ◽  
Soo Ho Kim ◽  
Dong-Joo Kim ◽  
Young Soo Yoon
Keyword(s):  
Thin Films ◽  
Plasma Treatment ◽  
Work Function ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Films ◽  
Zno Thin Film ◽  
Gas Sensitivity ◽  
Nano Structures ◽  
Acetone Detection ◽  
Deposition Conditions

AbstractWe deposited various nano structured ZnO thin films with plasma treatment on an alumina substrate and fabricate ZnO sensors for acetone detection. The ZnO sensors with various nano structures and the plasma treatment were deposited by radio frequency (RF) magnetron sputtering method with RuO2 micro heater and Ru electrode. In order to control a work function intentionally, the various deposition conditions and the plasma treatment were used. Sensitivities of the ZnO sensor were measured in acetone vapor and air at 250 degree C. In conclusion, we suggested that the sensitivity of ZnO sensors for acetone strongly depends on the work function of the as-deposited or plasma treated nano structured ZnO thin films.

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