scholarly journals Determination of the Elastic Behavior of Silicon Nanowires within a Scanning Electron Microscope

2016 ◽  
Vol 2016 ◽  
pp. 1-6 ◽  
Author(s):  
Nicole Wollschläger ◽  
Zuhal Tasdemir ◽  
Ines Häusler ◽  
Yusuf Leblebici ◽  
Werner Österle ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Cross Sections ◽  
Silicon Nanowires ◽  
Silicon Nanowire ◽  
Force Sensor ◽  
Native Oxide ◽  
Elastic Behavior ◽  
Show Evidence ◽  
Scanning Electron

Three-point bending tests were performed on double-anchored,110silicon nanowire samples in the vacuum chamber of a scanning electron microscope (SEM) via a micromanipulator equipped with a piezoresistive force sensor. Nanowires with widths of 35 nm and 74 nm and a height of 168 nm were fabricated. The nanowires were obtained monolithically along with their 10 μm tall supports through a top-down fabrication approach involving a series of etching processes. The exact dimension of wire cross sections was determined by transmission electron microscopy (TEM). Conducting the experiments in an SEM chamber further raised the opportunity of the direct observation of any deviation from ideal loading conditions such as twisting, which could then be taken into consideration in simulations. Measured force-displacement behavior was observed to exhibit close resemblance to simulation results obtained by finite element modeling, when the bulk value of 169 GPa was taken as the modulus of elasticity for110silicon. Hence, test results neither show any size effect nor show evidence of residual stresses for the considered nanoscale objects. The increased effect of the native oxide with reduced nanowire dimensions was captured as well. The results demonstrate the potential of the developed nanowire fabrication approach for the incorporation in functional micromechanical devices.

FIB Enhancement of Mechanically Polished Cross-sections

2019 ◽  
Author(s):  
Becky Holdford
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Scanning Electron Microscope ◽  
Cross Sections ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
High Resolution Imaging ◽  
Chemical Attack ◽  
Resolution Imaging ◽  
Scanning Electron

Abstract On mechanically polished cross-sections, getting a surface adequate for high-resolution imaging is sometimes beyond the analyst’s ability, due to material smearing, chipping, polishing media chemical attack, etc.. A method has been developed to enable the focused ion beam (FIB) to re-face the section block and achieve a surface that can be imaged at high resolution in the scanning electron microscope (SEM).

A study of the interaction of silver with amorphous chalcogenide films in the Scanning Electron Microscope

1990 ◽  
Vol 48 (4) ◽  
pp. 694-695
Author(s):  
A.G. Fitzgerald ◽  
S.M. Potrous
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Cross Sections ◽  
Photoelectron Spectroscopy ◽  
Depth Profiling ◽  
X Ray ◽  
Chalcogenide Films ◽  
Transmission Electron ◽  
Amorphous Chalcogenides ◽  
Scanning Electron

The diffusion of silver in amorphous chalcogenides is the basis for high-resolution lithographic applications. Previous studies of the diffusion of silver on contact with chalcogenide films has been studied by Auger depth profiling and the effects of photodoping on chemical bonding have been studied by x-ray photoelectron spectroscopy. Electron lithographic effects have been studied in the transmission electron microscope.The objective of the investigation described here has been to determine the degree of diffusion of silver in the amorphous chalcogenides, As2S3, As2Se3, GeS and GeSe when these films are in contact with thin silver films. The silver distribution has been determined by x-ray microanalysis of film cross-sections in the scanning electron microscope (SEM). Electron beam induced conductivity (EBIC) at points in these films has also been investigated.

TENSILE PROPERTIES OF CARBON NANOFIBERS USING NANO-MANIPULATOR INSIDE SCANNING ELECTRON MICROSCOPE

2011 ◽  
Vol 25 (31) ◽  
pp. 4233-4236 ◽  
Author(s):  
HOON-SIK JANG ◽  
SEUNG HOON NAHM ◽  
JUNG HAN KIM ◽  
KYU HWAN OH
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Tensile Test ◽  
Carbon Nanofiber ◽  
Strain Curve ◽  
Force Sensor ◽  
Displacement Curve ◽  
Set Up ◽  
Scanning Electron ◽  
Tem Grid

We performed the tensile test of an individual carbon nanofiber (CNF) inside a scanning electron microscope. The mechanical testing system was installed in a scanning electron microscope (SEM). The nano-manipulator was set up in the SEM, and the force sensor, which is formed as a cantilever, was mounted on the nano-manipulator. Then, the force sensor can be controlled by using the nano-manipulator. The CNFs were dispersed on the transmission electron microscope (TEM) grid, and the both end of the CNFs were welded on the TEM grid and the tip of force sensor by exposing electron-beam of the SEM. The tensile test of the CNFs was performed by controlling the nano-manipulator. The load response during the tensile test was obtained by force sensor. Stess-strain curve was obtained from force-displacement curve of CNF after tensile test. The elastic modulus of CNFs was calculated at ~12.5 GPa.

Tensile Test of Individual Multi Walled Carbon Nanotube Using Nano-Manipulator inside Scanning Electron Microscope

2006 ◽  
Vol 326-328 ◽  
pp. 329-332 ◽  
Author(s):  
Hoon Sik Jang ◽  
Sung Hwan Kwon ◽  
Am Kee Kim ◽  
Seung Hoon Nahm
Keyword(s):  
Electron Microscope ◽  
Carbon Nanotube ◽  
Scanning Electron Microscope ◽  
Tensile Test ◽  
Force Sensor ◽  
Displacement Curve ◽  
Linear Deformation ◽  
Deformation And Fracture ◽  
Multi Walled Carbon Nanotube ◽  
Scanning Electron

We have attempted to observe straining responses of an individual multi-walled carbon nanotube (MWNT) by performing an in-situ tensile testing inside scanning electron microscope (SEM). The both ends of an individual MWNT was attached on the rigid support and the tip of the force sensor using electron beam and was elongated by a nano-manipulator. The nano-manipulator was automatically controlled by personal computer. Linear deformation and fracture behaviors of MWNT were successfully observed and its force-displacement curve was also measured from the bending stiffness and displacement of the force sensor and manipulator. The tensile properties of individual MWNT were evaluated from the tensile test results.

“Casino V2.0 : An Advance Simulation Tool for Scanning Electron Microscope Users”

2001 ◽  
Vol 7 (S2) ◽  
pp. 684-685
Author(s):  
D. Drouin ◽  
A.R. Couture ◽  
R. Gauvin
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Cross Sections ◽  
Thin Foil ◽  
Single Scattering ◽  
X Rays ◽  
Backscattered Electron ◽  
Version 2.0 ◽  
The Moment ◽  
Scanning Electron

The topic of this paper is to present a new Windows™ environment version of the CASINO Monte Carlo program. The goal of this program is to assist scanning electron microscope users in their routine analysis and also in more advanced topic such as electron beam lithography for example. Based on a single scattering algorithm, this software is specially designed for low beam interaction in a bulk and thin foil. This program uses tabulated Mott elastic cross-sections, which benefit of both fast calculation and accurate interaction at low beam energy. At the moment CASINO can either be used to generate X-rays or backscattered electron signals. The program used simple two-dimension geometry to represent real sample. in this version, vertical and horizontal planes can be generated to allow cross-section representation or multi-layers analysis. Then beam can be scanned across different regions to produce X-ray linescan or bascattered electron profiles.Many new convenient features have been added to the version 2.0 of CASINO. The new interface lets the users to consult the results as the simulation is still in progress.

X-Ray Emission of Porous Materials In The Scanning Electron Microscope Computed Using Monte Carlo Simulations

1997 ◽  
Vol 3 (S2) ◽  
pp. 883-884 ◽  
Author(s):  
Raynald Gauvin
Keyword(s):  
Monte Carlo ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Monte Carlo Simulations ◽  
Porous Materials ◽  
Cross Sections ◽  
Quantitative Methods ◽  
Electron Trajectories ◽  
X Ray ◽  
Scanning Electron

Conventional quantitative X-ray microanalysis in the scanning electron microscope or in the electron microprobe is valid for specimens of bulk homogeneous composition and with flat and polished surfaces. Quantitative methods, using X-ray microanalysis and Monte Carlo simulations of electron trajectories in solids, have been developed for the chemical analysis of spherical inclusions embedded in a matrix and for multilayered specimens. In this paper, the effect of porosity and of the size of the pores are investigated concerning their effect on X-ray emission using Monte Carlo simulation of electron trajectories in solids since porous materials are of great technological importance.This new Monte Carlo program uses elastic Mott cross-sections to compute electron trajectories and the Joy & Luo modification of the continuous Bethe law of energy loss and the details are given elsewhere. This program assumes that all the pores are spherical and have the same size.

Out-of-Plane MEMS Actuation Using a Scanning Electron Microscope

2012 ◽  
Author(s):  
Alexander L. Hogan ◽  
Kurtis R. Ford ◽  
Ian R. Harvey
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Force Sensor ◽  
Plane Motion ◽  
Elastic Model ◽  
Spiral Spring ◽  
Out Of Plane ◽  
Mems Technology ◽  
Static Mechanical ◽  
Scanning Electron

In the world of micro-electromechanical systems (MEMS) R&D efforts are expended creating new means of actuation, usually trading either force or displacement. In our scheme we pump charge into an electrically isolated conductive system with a Scanning Electron Microscope (SEM) to achieve a net force away from the substrate. Though we observe a highly dynamic response, we have approximated the force of the system with a quasi-static mechanical force sensor. The study of this actuation has focused on a spiral spring fabricated in Sandia Ultra-planar Multi-level MEMS Technology (SUMMiT-V™). Experiments show the effect of SEM beam conditions on this device, most notably finding the operation to begin at 5 keV accelerating voltage, where our Monte Carlo simulation predicts the beam will begin penetrating the 0.3 μm thick polySi. The out-of-plane motion has been measured as high as 220 μm which is approximately 2/3 of the diameter of the 2D spiral. A linear elastic model of the force sensor shows that in mechanical equilibrium the deflection is associated with an equivalent uniform pressure up to 90 Pa.

Factors Affecting on the Bond Strength of Dental Zirconia to Veneering Porcelains

2012 ◽  
Vol 529-530 ◽  
pp. 507-511 ◽  
Author(s):  
Jiro Tsuruki ◽  
Hiroshi Kono ◽  
Yuji Okuda ◽  
Makoto Noda ◽  
Hiroyuki Arikawa ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Cross Sections ◽  
Testing Machine ◽  
Acrylic Resin ◽  
Factors Affecting ◽  
Specimen Holder ◽  
Universal Testing ◽  
Bond Strengths ◽  
Scanning Electron

The bond strengths between two kinds of zirconia and three kinds of feldspathic veneering porcelains were measured. The specimens were prepared at four firing temperatures for three holding periods, respective opaque porcelain was painted and vacuum-fired. Then, each dentin porcelain was condensed in an acrylic resin mold and vacuum-fired under the conditions mentioned above. Cross sections of the interface between zirconia and porcelain were observed with a scanning electron microscope. The specimens were fixed to specimen holder on a universal testing machine. Data of the bonding test were statistically analyzed. The results showed that all the four factors statistically affected the bonding strength (p<0.01). The contribution of the firing temperature was highest and that of the porcelain type was lowest (p<0.01).

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