AlGaN/GaN High Electron Mobility Transistors with Multi-MgxNy/GaN Buffer
Keyword(s):
We report the fabrication of AlGaN/GaN high electron mobility transistors with multi-MgxNy/GaN buffer. Compared with conventional HEMT devices with a low-temperature GaN buffer, smaller gate and source-drain leakage current could be achieved with this new buffer design. Consequently, the electron mobility was larger for the proposed device due to the reduction of defect density and the corresponding improvement of crystalline quality as result of using the multi-MgxNy/GaN buffer.
2019 ◽
Vol 100-101
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pp. 113432
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1996 ◽
Vol 14
(3)
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pp. 2236
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1994 ◽
Vol 33
(Part 2, No. 6B)
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pp. L826-L829
1997 ◽
Vol 44
(11)
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pp. 1883-1887
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