Solid Phase Growth of Nickel Silicides in Polycrystalline Si Film on SiO2
with Cl Plasma Containing NiCl
Keyword(s):
Keyword(s):
2013 ◽
Vol 535-536
◽
pp. 89-93
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Keyword(s):
2013 ◽
Vol 10
(12)
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pp. 1708-1711
◽
2014 ◽
Vol 778-780
◽
pp. 1162-1165