scholarly journals Solid Phase Growth of Nickel Silicides in Polycrystalline Si Film on SiO2 with Cl Plasma Containing NiCl

2012 ◽  
2013 ◽  
Vol 753 ◽  
pp. 505-509
Author(s):  
Yuichi Sato ◽  
Toshifumi Suzuki ◽  
Hiroyuki Mogami ◽  
Fumito Otake ◽  
Hirotoshi Hatori ◽  
...  

Solid phase growth of thin films of copper (Cu), aluminum (Al) and zinc oxide (ZnO) on single crystalline sapphire and quartz glass substrates were tried by heat-treatments and their crystallization conditions were investigated. ZnO thin films relatively easily recrystallized even when they were deposited on the amorphous quartz glass substrate. On the other hand, Cu and Al thin films hardly recrystallized when they were deposited on the quartz glass substrate. The metal thin films could be recrystallized at only extremely narrow windows of the heat-treatment conditions when they were deposited on the single crystalline sapphire substrate. The window of the solid phase heteroepitaxial growth condition of the Al film was wider than that of the Cu film.


1988 ◽  
Vol 64 (8) ◽  
pp. 4187-4193 ◽  
Author(s):  
A. Rockett ◽  
J. E. Greene ◽  
H. Jiang ◽  
M. Östling ◽  
C. S. Petersson

2013 ◽  
Vol 535-536 ◽  
pp. 89-93 ◽  
Author(s):  
Alexander V. Manzhirov

Phase transitions can be usually observed in nature and technology which effectively utilize certain types of these transitions. An approach to modeling phase transition processes on the basis of the mathematical theory of growing solids is developed. Liquid-solid and gas-solid phase transitions are under consideration. Main attention is paid to the processes of solid phase growth and deformation.


2003 ◽  
Vol 16 (3-4) ◽  
pp. 505-508 ◽  
Author(s):  
Y. Murakami ◽  
H. Kido ◽  
A. Kenjo ◽  
T. Sadoh ◽  
T. Yoshitake ◽  
...  

2006 ◽  
Vol 51 (19) ◽  
pp. 3969-3978
Author(s):  
M.A. Pasquale ◽  
S.L. Marchiano ◽  
J.L. Vicente ◽  
A.J. Arvia

2013 ◽  
Vol 10 (12) ◽  
pp. 1708-1711 ◽  
Author(s):  
Takashi Ikehata ◽  
Tatsuya Ando ◽  
Takuya Yamamoto ◽  
Yuta Takagi ◽  
Naoyuki Sato ◽  
...  

2014 ◽  
Vol 778-780 ◽  
pp. 1162-1165
Author(s):  
Enrique Escobedo-Cousin ◽  
Konstantin Vassilevski ◽  
Toby Hopf ◽  
Nicholas Wright ◽  
Anthony G. O'Neill ◽  
...  

This work presents experimental evidence of the formation mechanisms of few-layer graphene (FLG) films on SiC by nickel silicidation. FLG is formed by annealing of a 40 nm thick Ni layer on 6H-SiC at 1035ºC for 60 s, resulting in a Ni2Si layer which may be capped by any Ni that did not react during annealing. It has been proposed that FLG forms on top of the Ni during the high temperature stage. In contrast, during cooling, carbon atoms which were released during the silicidation reaction may diffuse back towards the Ni2Si/SiC interface to form a second FLG film. After annealing, layer-by-layer de-processing was carried out in order to unequivocally identify the FLG at each location using Atomic force microscopy (AFM) and Raman spectroscopy.


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