Impact of Some Processing Steps onto the Strain Distributions in FD-SOI CMOS Planar Devices: A Contribution of Dark-Field Electron Holography

2018 ◽  
Vol 7 (9) ◽  
pp. P473-P479
Author(s):  
V. Boureau ◽  
D. Benoit ◽  
A. Claverie
Keyword(s):  
Dark Field ◽  
Electron Holography ◽  
Field Electron ◽  
Dark Field Electron ◽  
Processing Steps ◽  
Soi Cmos

Annealed Si∕SiGeC Superlattices Studied by Dark-Field Electron Holography, ToF-SIMS and Infrared Spectroscopy

2011 ◽  
Author(s):  
T. Denneulin ◽  
J. L. Rouvière ◽  
A. Béché ◽  
M. Py ◽  
J. P. Barnes ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Dark Field ◽  
Electron Holography ◽  
Tof Sims ◽  
Field Electron ◽  
Dark Field Electron

Field mapping of focused ion beam prepared semiconductor devices by off-axis and dark field electron holography

2013 ◽  
Vol 28 (12) ◽  
pp. 125013 ◽  
Author(s):  
David Cooper ◽  
Pierrette Rivallin ◽  
Georges Guegan ◽  
Christophe Plantier ◽  
Eric Robin ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Semiconductor Devices ◽  
Dark Field ◽  
Electron Holography ◽  
Field Mapping ◽  
Field Electron ◽  
Dark Field Electron

scholarly journals Suppressing Geometric Phase Shift Owing to Antiphase Boundaries in Dark-Field Electron Holography

2019 ◽  
Vol 60 (5) ◽  
pp. 698-703
Author(s):  
Youngji Cho ◽  
Kodai Niitsu ◽  
Yoshihiro Midoh ◽  
Koji Nakamae ◽  
Daisuke Shindo ◽  
...  
Keyword(s):  
Phase Shift ◽  
Geometric Phase ◽  
Dark Field ◽  
Electron Holography ◽  
Antiphase Boundaries ◽  
Field Electron ◽  
Dark Field Electron

Strain measurement in ferromagnetic crystals using dark-field electron holography

2016 ◽  
Vol 109 (19) ◽  
pp. 193102 ◽  
Author(s):  
Yasukazu Murakami ◽  
Kodai Niitsu ◽  
Syuhei Kaneko ◽  
Toshiaki Tanigaki ◽  
Taisuke Sasaki ◽  
...  
Keyword(s):  
Strain Measurement ◽  
Dark Field ◽  
Electron Holography ◽  
Field Electron ◽  
Dark Field Electron

Strain in Hydrogen-Implanted Si Investigated Using Dark-Field Electron Holography

2013 ◽  
Vol 6 (9) ◽  
pp. 091301 ◽  
Author(s):  
Nikolay Cherkashin ◽  
Shay Reboh ◽  
Lubk ◽  
Martin J. Hÿtch ◽  
Alain Claverie
Keyword(s):  
Dark Field ◽  
Electron Holography ◽  
Field Electron ◽  
Dark Field Electron
Sign in / Sign up

Export Citation Format

Share Document