Morphology of Oxygen Precipitates in RTA Pre-Treated Czochralski Silicon Wafers Investigated by FTIR Spectroscopy and STEM

2014 ◽  
Vol 3 (11) ◽  
pp. P370-P375 ◽  
Author(s):  
D. Kot ◽  
G. Kissinger ◽  
M. A. Schubert ◽  
A. Sattler
Keyword(s):  
Ftir Spectroscopy ◽  
Silicon Wafers ◽  
Czochralski Silicon ◽  
Oxygen Precipitates

Investigation of stoichiometry of oxygen precipitates in Czochralski silicon wafers by means of EDX, EELS and FTIR spectroscopy

2016 ◽  
Vol 99 ◽  
pp. 231-235 ◽  
Author(s):  
D. Kot ◽  
G. Kissinger ◽  
M.A. Schubert ◽  
M. Klingsporn ◽  
A. Huber ◽  
...  
Keyword(s):  
Ftir Spectroscopy ◽  
Silicon Wafers ◽  
Czochralski Silicon ◽  
Oxygen Precipitates

Composition of oxygen precipitates in Czochralski silicon wafers investigated by STEM with EDX/EELS and FTIR spectroscopy

2015 ◽  
Vol 9 (7) ◽  
pp. 405-409 ◽  
Author(s):  
Dawid Kot ◽  
Gudrun Kissinger ◽  
Markus Andreas Schubert ◽  
Max Klingsporn ◽  
Andreas Huber ◽  
...  
Keyword(s):  
Ftir Spectroscopy ◽  
Silicon Wafers ◽  
Czochralski Silicon ◽  
Oxygen Precipitates

Oxygen precipitates in annealed CZ silicon wafers detected by SIRM and FTIR spectroscopy

1996 ◽  
Vol 36 (1-3) ◽  
pp. 200-203 ◽  
Author(s):  
Caroline Veve ◽  
Michael Stemmer ◽  
Santo Martinuzzi
Keyword(s):  
Ftir Spectroscopy ◽  
Silicon Wafers ◽  
Oxygen Precipitates
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