scholarly journals Mo-Doped La2O3 as Charge-Trapping Layer for Improved Low-Voltage Flash-Memory Performance

2013 ◽  
Vol 2 (11) ◽  
pp. Q87-Q89 ◽  
Author(s):  
Q. B. Tao ◽  
P. T. Lai
2011 ◽  
Vol 44 (15) ◽  
pp. 155105 ◽  
Author(s):  
Yujeong Seo ◽  
Ho-Myoung An ◽  
Hee-Dong Kim ◽  
In Rok Hwang ◽  
Sa Hwan Hong ◽  
...  

2015 ◽  
Vol 7 (18) ◽  
pp. 10067-10067
Author(s):  
Chergn-En Sun ◽  
Chin-Yu Chen ◽  
Ka-Lip Chu ◽  
Yung-Shao Shen ◽  
Chia-Chun Lin ◽  
...  

2015 ◽  
Vol 7 (12) ◽  
pp. 6383-6390 ◽  
Author(s):  
Chergn-En Sun ◽  
Chin-Yu Chen ◽  
Ka-Lip Chu ◽  
Yung-Shao Shen ◽  
Chia-Chun Lin ◽  
...  

2017 ◽  
Vol 7 (1) ◽  
Author(s):  
Yung-Shao Shen ◽  
Kuen-Yi Chen ◽  
Po-Chun Chen ◽  
Teng-Chuan Chen ◽  
Yung-Hsien Wu

Micromachines ◽  
2021 ◽  
Vol 12 (11) ◽  
pp. 1401
Author(s):  
Jun-Kyo Jeong ◽  
Jae-Young Sung ◽  
Woon-San Ko ◽  
Ki-Ryung Nam ◽  
Hi-Deok Lee ◽  
...  

In this study, polycrystalline silicon (poly-Si) is applied to silicon-oxide-nitride-oxide-silicon (SONOS) flash memory as a channel material and the physical and electrical characteristics are analyzed. The results show that the surface roughness of silicon nitride as charge trapping layer (CTL) is enlarged with the number of interface traps and the data retention properties are deteriorated in the device with underlying poly-Si channel which can be serious problem in gate-last 3D NAND flash memory architecture. To improve the memory performance, high pressure deuterium (D2) annealing is suggested as a low-temperature process and the program window and threshold voltage shift in data retention mode is compared before and after the D2 annealing. The suggested curing is found to be effective in improving the device reliability.


2014 ◽  
Vol 2 (21) ◽  
pp. 4233-4238 ◽  
Author(s):  
Jiaqing Zhuang ◽  
Su-Ting Han ◽  
Ye Zhou ◽  
V. A. L. Roy

Hafnium dioxide (HfO2) film prepared by the sol–gel technique has been used as a charge trapping layer in organic flash memory.


2012 ◽  
Vol 33 (9) ◽  
pp. 1264-1266 ◽  
Author(s):  
Li-Jung Liu ◽  
Kuei-Shu Chang-Liao ◽  
Yi-Chuen Jian ◽  
Jen-Wei Cheng ◽  
Tien-Ko Wang ◽  
...  

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