Method for Extracting Ge Concentration of SiGe Channel FinFET Device Using Three-Dimensional Spectroscopic Ellipsometry-Optical Critical Dimension Metrology

2014 ◽  
Vol 3 (9) ◽  
pp. P105-P107
Author(s):  
C.-H. Chen ◽  
Y.-C. Fang ◽  
C.-H. Chiang ◽  
S.-Y. Chu
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Three Dimensional ◽  
Critical Dimension

Roughness Analysis of the Critical Dimension by Using Spectroscopic Ellipsometry

2011 ◽  
Vol 58 (5(1)) ◽  
pp. 1426-1428 ◽  
Author(s):  
T. H. Ghong ◽  
S.-H. Han ◽  
J.-M. Chung ◽  
J. S. Byun ◽  
Y. D. Kim ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Critical Dimension ◽  
Roughness Analysis

OPTICAL PROPERTIES OF GLASSY CARBON

2002 ◽  
Vol 09 (01) ◽  
pp. 473-477 ◽  
Author(s):  
L. PAJASOVÁ ◽  
L. SOUKUP ◽  
L. JASTRABÍK ◽  
D. CHVOSTOVÁ
Keyword(s):  
Heat Treatment ◽  
Optical Properties ◽  
Glassy Carbon ◽  
Spectroscopic Ellipsometry ◽  
Optical Constants ◽  
Three Dimensional ◽  
Polarized Light ◽  
Electron Plasma ◽  
Electron Transitions ◽  
Average Size

The optical constants and dielectric functions of a series of samples of glassy carbon subjected to a heat treatment from 1000°C to 3000°C have been evaluated in the spectral region of 1.5–13.8 eV. In the region of 1.5–5.0 eV the method of spectroscopic ellipsometry and multiangle reflectivity with p-polarized light was applied, while in the VUV region the optical constants were evaluated by means of multiangle reflectivity with partially polarized light as well as by means of Kramers–Kronig analysis. The optical spectra are discussed, in analogy with graphite, in terms of single-electron transitions and π electron plasma excitations. The changes in the spectra by heating are ascribed to increasing average size of ordered regions and sample densification in the absence of three-dimensional graphitization.

Determining the shape and periodicity of nanostructures using small-angle X-ray scattering

2015 ◽  
Vol 48 (5) ◽  
pp. 1355-1363 ◽  
Author(s):  
Daniel F. Sunday ◽  
Scott List ◽  
Jasmeet S. Chawla ◽  
R. Joseph Kline
Keyword(s):  
Small Angle ◽  
Semiconductor Industry ◽  
Three Dimensional ◽  
Critical Dimension ◽  
Dimensional Structure ◽  
Critical Dimensions ◽  
X Ray ◽  
Line Shapes ◽  
X Ray Scattering ◽  
Ray Scattering

The semiconductor industry is exploring new metrology techniques capable of meeting the future requirement to characterize three-dimensional structure where the critical dimensions are less than 10 nm. X-ray scattering techniques are one candidate owing to the sub-Å wavelengths which are sensitive to internal changes in electron density. Critical-dimension small-angle X-ray scattering (CDSAXS) has been shown to be capable of determining the average shape of a line grating. Here it is used to study a set of line gratings patternedviaa self-aligned multiple patterning process, which resulted in a set of mirrored lines, where the individual line shapes were asymmetric. The spacing between lines was systematically varied by sub-nm shifts. The model used to simulate the scattering was developed in stages of increasing complexity in order to justify the large number of parameters included. Comparisons between the models at different stages of development demonstrate that the measurement can determine differences in line shapes within the superlattice. The shape and spacing between lines within a given set were determined to sub-nm accuracy. This demonstrates the potential for CDSAXS as a high-resolution nanostructure metrology tool.

A generalized multibody model for inversion of magnetic anomalies

Geophysics ◽  
1980 ◽  
Vol 45 (2) ◽  
pp. 255-270 ◽  
Author(s):  
B. K. Bhattacharyya
Keyword(s):  
Magnetic Field ◽  
Three Dimensional ◽  
Magnetization Vector ◽  
Critical Dimension ◽  
Magnetic Anomalies ◽  
Field Vector ◽  
Magnetic Survey ◽  
Multibody Model ◽  
Anomalous Field ◽  
Rectangular Block

The height of the observation surface above a magnetized region primarily determines the critical dimension of the smallest inhomogeneity in magnetization that can be resolved from magnetic survey data. When a rectangular block is smaller in size than this critical dimension, it appears homogeneously magnetized in the observed magnetic field. This consideration leads to the selection of a unit rectangular block of suitable dimensions with homogeneous magnetization. The magnetized region creating the anomalous field values in the area of observation can, therefore, be broken up into several blocks having different magnetizations, each block being equal in size and uniformly magnetized. The iterative method described here assumes initially that the anomalous field values are caused by a three‐dimensional (3-D) distribution of magnetized rectangular blocks. The optimum orientation of these blocks with respect to geographic north is then determined. This orientation is particularly insensitive to adjustments in the dimensions of the blocks. The top and bottom surfaces of each of the blocks in one or more layers are adjusted in a least‐squares sense to minimize the difference between observed and calculated field values. A method is also described for constraining the magnetization vector of each block to lie within a specified angle of the normal or reversed direction of the geomagnetic field vector. The procedure for analysis of data can also be extended to the case of anomalies over a draped surface. At the conclusion of the iterations, a 3-D distribution of magnetization is generated to delineate the magnetized region responsible for the observed anomalous magnetic field. Examples including model and aeromagnetic data are provided to demonstrate the usefulness of a generalized multibody model for inversion of magnetic anomalies.

scholarly journals True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor

Sensors ◽  
2021 ◽  
Vol 22 (1) ◽  
pp. 314
Author(s):  
Jan Thiesler ◽  
Thomas Ahbe ◽  
Rainer Tutsch ◽  
Gaoliang Dai
Keyword(s):  
Three Dimensional ◽  
Critical Dimension ◽  
Selectivity Ratio ◽  
Line Edge Roughness ◽  
Long Term Stability ◽  
Atomic Force ◽  
Edge Roughness ◽  
Spatial Dimensions ◽  
Optical Lever

State of the art three-dimensional atomic force microscopes (3D-AFM) cannot measure three spatial dimensions separately from each other. A 3D-AFM-head with true 3D-probing capabilities is presented in this paper. It detects the so-called 3D-Nanoprobes CD-tip displacement with a differential interferometer and an optical lever. The 3D-Nanoprobe was specifically developed for tactile 3D-probing and is applied for critical dimension (CD) measurements. A calibrated 3D-Nanoprobe shows a selectivity ratio of 50:1 on average for each of the spatial directions x, y, and z. Typical stiffness values are kx = 1.722 ± 0.083 N/m, ky = 1.511 ± 0.034 N/m, and kz = 1.64 ± 0.16 N/m resulting in a quasi-isotropic ratio of the stiffness of 1.1:0.9:1.0 in x:y:z, respectively. The probing repeatability of the developed true 3D-AFM shows a standard deviation of 0.18 nm, 0.31 nm, and 0.83 nm for x, y, and z, respectively. Two CD-line samples type IVPS100-PTB, which were perpendicularly mounted to each other, were used to test the performance of the developed true 3D-AFM: repeatability, long-term stability, pitch, and line edge roughness and linewidth roughness (LER/LWR), showing promising results.

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