scholarly journals Nanoscale optical critical dimension measurement of a contact hole using deep ultraviolet spectroscopic ellipsometry

2013 ◽  
Vol 31 (1) ◽  
pp. 011803 ◽  
Author(s):  
Houssam Chouaib ◽  
Qiang Zhao
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Critical Dimension ◽  
Dimension Measurement ◽  
Deep Ultraviolet

scholarly journals Critical dimension measurement of transparent film layers by multispectral imaging

2014 ◽  
Vol 22 (14) ◽  
pp. 17370 ◽  
Author(s):  
Soonyang Kwon ◽  
Namyoon Kim ◽  
Taeyong Jo ◽  
Heui Jae Pahk
Keyword(s):  
Multispectral Imaging ◽  
Critical Dimension ◽  
Transparent Film ◽  
Dimension Measurement

Critical-Dimension Measurement using Multi-Angle-Scanning Method in Atomic Force Microscope

2006 ◽  
Vol 45 (7) ◽  
pp. 5928-5932 ◽  
Author(s):  
Ken Murayama ◽  
Satoshi Gonda ◽  
Hajime Koyanagi ◽  
Tsuneo Terasawa ◽  
Sumio Hosaka
Keyword(s):  
Atomic Force Microscope ◽  
Critical Dimension ◽  
Scanning Method ◽  
Atomic Force ◽  
Dimension Measurement

Characterization of Interfacial Layer of DUV Coatings by Spectroscopic Ellipsometry

2013 ◽  
Vol 662 ◽  
pp. 277-283
Author(s):  
Wen Yuan Deng
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Interfacial Layer ◽  
Single Layer ◽  
Double Layers ◽  
Optical Index ◽  
Variable Angle ◽  
Layer Sample ◽  
Deep Ultraviolet ◽  
Variable Angle Spectroscopic Ellipsometry

The Interfacial layer has an important influence on the optical performance of the deep ultraviolet (DUV) coatings. The variable angle Spectroscopic ellipsometry measurements of three kinds of DUV coating samples were performed in the wavelength range 150-500nm using a purged variable angle Spectroscopic ellipsometer. The samples include the single layer sample, double layers sample, and three layers sample. The thickness and optical index of the MgF2 layer and LaF3 layer as well as those of the interfacial layer between them were obtained by successful regression of the SE measurements. For the single layer, the agreement of the results between the SE and the spectrophotometic techniques was very good. The obtained thickness of the two kinds of interfacial layer was in consistent with the RMS results of the single layer obtained by AFM, indicating the obtained results were reliable.

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