Cu Corrosion during Post-CMP Clean - Cause and Prevention

2019 ◽  
Vol 44 (1) ◽  
pp. 573-577 ◽  
Author(s):  
Sen-Hua (Samuel) Li ◽  
Jun Liu ◽  
Cuong Tran ◽  
EngHoe Tan ◽  
Qiang Li ◽  
...  
Keyword(s):  
Cu Corrosion

Effect of Dissolved Oxygen on Cu Corrosion in Single Wafer Cleaning Process

2009 ◽  
Vol 48 (4) ◽  
pp. 04C023 ◽  
Author(s):  
Masayoshi Imai ◽  
Yukinari Yamashita ◽  
Takashi Futatsuki ◽  
Morio Shiohara ◽  
Seiichi Kondo ◽  
...  
Keyword(s):  
Dissolved Oxygen ◽  
Cleaning Process ◽  
Wafer Cleaning ◽  
Cu Corrosion

Electrochemical Investigation Cu Corrosion Behaviour of Electronic Circuit Board in Base Electrolyte

2014 ◽  
Vol 556-562 ◽  
pp. 141-144
Author(s):  
Zhi Hua Tao ◽  
Bin Leng ◽  
Chong Wang ◽  
Ding Jun Xiao ◽  
Ze Tan ◽  
...  
Keyword(s):  
Potentiodynamic Polarization ◽  
Electronic Circuit ◽  
Corrosion Behaviour ◽  
Chloride Ions ◽  
Circuit Board ◽  
Corrosion Mechanism ◽  
Base Electrolyte ◽  
Eis Measurements ◽  
Inhibition Performance ◽  
Cu Corrosion

The eleetronic material, or even the whole equipments may be destroyed by very slight corrosion, so it is important to study the corrosion mechanism and corrosion protections. The Cyproconazole as a Cu corrosion inhibitor for Electronic Circuit Board in the base electrolyte (containing 70 ppm chloride ions, 0.54 mol/L H2SO4and 0.8 mol/L CuSO4) was investigated using polarization curves and AC impedance. The results showed that the inhibition performance of the Cyproconazole depended on the concentration of the inhibitor and the highest inhibition efficiency of the Cyproconazole reached 99.9% at 1×10-3mol/L in the base electrolyte. The results obtained from EIS measurements are in good agreement with that obtained from potentiodynamic polarization. Potentiodynamic polarization studies clearly revealed that Cyproconazole adsorption acted essentially as the mixed-type inhibitor.

Effect of Pattern Layout and Dissolved Oxygen in CO2Rinse Water on Cu Corrosion during Post-Etch Cleaning

2010 ◽  
Vol 49 (5) ◽  
pp. 05FF04 ◽  
Author(s):  
Kentaro Tokuri ◽  
Yukinari Yamashita ◽  
Morio Shiohara ◽  
Noriaki Oda ◽  
Seiichi Kondo ◽  
...  
Keyword(s):  
Dissolved Oxygen ◽  
Cu Corrosion

Inhibition Effect of TT-LYK on Cu Corrosion and Galvanic Corrosion between Cu and Co during CMP in Alkaline Slurry

2019 ◽  
Vol 8 (8) ◽  
pp. P437-P447 ◽  
Author(s):  
Lianjun Hu ◽  
Guofeng Pan ◽  
Xinbo Zhang ◽  
Ping He ◽  
Chenwei Wang
Keyword(s):  
Galvanic Corrosion ◽  
Inhibition Effect ◽  
Cu Corrosion

Infrared−Visible Sum Frequency Generation Investigation of Cu Corrosion Inhibition with Benzotriazole

2004 ◽  
Vol 76 (3) ◽  
pp. 604-609 ◽  
Author(s):  
Zachary D. Schultz ◽  
Mary Ellen Biggin ◽  
Jeffrey O. White ◽  
Andrew A. Gewirth
Keyword(s):  
Corrosion Inhibition ◽  
Sum Frequency Generation ◽  
Sum Frequency ◽  
Frequency Generation ◽  
Cu Corrosion

Relative Humidity Cycling Effect on Ag and Cu Corrosion

2017 ◽  
Vol 77 (11) ◽  
pp. 767-775
Author(s):  
Bo Yuan ◽  
Debbie A Flemming ◽  
John Franey ◽  
Robert L. Opila ◽  
Chen Xu
Keyword(s):  
Relative Humidity ◽  
Cu Corrosion

Effect of Dissolved Oxygen for Advanced Wet Processing

2014 ◽  
Vol 219 ◽  
pp. 85-88 ◽  
Author(s):  
Yukifumi Yoshida ◽  
Masayuki Otsuji ◽  
Hiroaki Takahashi ◽  
Jim Snow ◽  
Farid Sebaai ◽  
...  
Keyword(s):  
Dissolved Oxygen ◽  
Surface Preparation ◽  
Hydrophobic Surface ◽  
New Materials ◽  
Processing Methods ◽  
Wet Processing ◽  
Do Concentration ◽  
Cu Corrosion

of these new materials have necessitated the evaluation of new chemicals and processing methods. The control of the Dissolved Oxygen (DO) concentration to suppress Cu corrosion is well established in BEOL processing and likewise in order to achieve a hydrophobic surface after pre-epi cleaning in FEOL surface preparation [2].

scholarly journals Cu Corrosion Test Method for Lead-Free Solders

2017 ◽  
Vol 35 (3) ◽  
pp. 21-27
Author(s):  
Mi-Song Kim ◽  
Won Sik Hong ◽  
Chul Min Oh ◽  
Keun-Soo Kim
Keyword(s):  
Corrosion Test ◽  
Test Method ◽  
Lead Free ◽  
Lead Free Solders ◽  
Cu Corrosion
Sign in / Sign up

Export Citation Format

Share Document