Study of Post Plasma Doping Photoresist Strip

2019 ◽  
Vol 44 (1) ◽  
pp. 363-368 ◽  
Author(s):  
Shijian Luo ◽  
Frank Torregrosa ◽  
James DeLuca ◽  
Jianan Hou ◽  
Ivan Berry ◽  
...  
Keyword(s):  
Plasma Doping

Advanced optimization and process control of plasma doping apparatus

2008 ◽  
Vol 5 (4) ◽  
pp. 911-914 ◽  
Author(s):  
T. Miller ◽  
R. Dorai ◽  
L. Godet ◽  
G. D. Papasouliotis ◽  
V. Singh
Keyword(s):  
Process Control ◽  
Plasma Doping

Highly conductive PEDOT:PTS films interfacially polymerized using electro spray deposition and enhanced by plasma doping

2014 ◽  
Vol 53 (3) ◽  
pp. 035501 ◽  
Author(s):  
Seul-Gi Kim ◽  
Jong-Won Yang ◽  
Jun-Taek Lee ◽  
Jin-Yeol Kim
Keyword(s):  
Spray Deposition ◽  
Plasma Doping

Formation of Ultra-Shallow Junctions by Advanced Plasma Doping Techniques

2011 ◽  
Author(s):  
G. D. Papasouliotis ◽  
L. Godet ◽  
V. Singh ◽  
R. Miura ◽  
H. Ito ◽  
...  
Keyword(s):  
Plasma Doping ◽  
Shallow Junctions ◽  
Ultra Shallow Junctions

Effects of low-temperature postannealing on a n+-p shallow junction fabricated by plasma doping

2005 ◽  
Vol 86 (19) ◽  
pp. 193503 ◽  
Author(s):  
Sungkweon Baek ◽  
Hyunsang Hwang ◽  
Kiju Im ◽  
Chang-Geun Ahn ◽  
Jong-Heon Yang ◽  
...  
Keyword(s):  
Low Temperature ◽  
Shallow Junction ◽  
Plasma Doping

Microwave plasma doping: Arsenic activation and transport in germanium and silicon

2016 ◽  
Vol 55 (4S) ◽  
pp. 04EB05 ◽  
Author(s):  
Hidenori Miyoshi ◽  
Masahiro Oka ◽  
Hirokazu Ueda ◽  
Peter L. G. Ventzek ◽  
Yasuhiro Sugimoto ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Plasma Doping
Sign in / Sign up

Export Citation Format

Share Document