Advanced optimization and process control of plasma doping apparatus

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Vol 5 (4) ◽  
pp. 911-914 ◽  
Author(s):  
T. Miller ◽  
R. Dorai ◽  
L. Godet ◽  
G. D. Papasouliotis ◽  
V. Singh
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Process Control ◽  
Plasma Doping

Process Control in Production-Worthy Plasma Doping Technology

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Author(s):  
Edmund J. Winder ◽  
Ziwei Fang ◽  
Edwin Arevalo ◽  
Tim Miller ◽  
Harold Persing ◽  
...  
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INSTRUMENTATION - Mass Spectrometry Process Control

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Vol 48 (2) ◽  
pp. 81-84
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William Priestley ◽  
B. Dudenbostel, Jr.
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Mass Spectrometry ◽  
Process Control

FTIR based process control for industrial reactors

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Vol 09 (PR8) ◽  
pp. Pr8-995-Pr8-1002 ◽  
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PROTECTIVE CVD COATINGS FOR THE TOOL INDUSTRY : REQUIREMENTS FOR PROCESS CONTROL AND EQUIPMENT

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Vol 50 (C5) ◽  
pp. C5-433-C5-433
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E. MOHN ◽  
R. BONETTI ◽  
H. WIPRÄCHTIGER
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Process Control
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