Removal of Anodic Aluminum Oxide Barrier Layer on Silicon Substrate by using Cl2/BCl3 Neutral Beam Etching

2011 ◽  
Vol 158 (5) ◽  
pp. D254 ◽  
Author(s):  
J. K. Yeon ◽  
W. S. Lim ◽  
J. B. Park ◽  
N. Y. Kwon ◽  
S. I. Kim ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Barrier Layer ◽  
Silicon Substrate ◽  
Anodic Aluminum Oxide ◽  
Neutral Beam ◽  
Anodic Aluminum ◽  
Oxide Barrier ◽  
Neutral Beam Etching

Control of the Anodic Aluminum Oxide Barrier Layer Opening Process by Wet Chemical Etching

Langmuir ◽  
2007 ◽  
Vol 23 (3) ◽  
pp. 1564-1568 ◽  
Author(s):  
Catherine Y. Han ◽  
Gerold A. Willing ◽  
Zhili Xiao ◽  
H. Hau Wang
Keyword(s):  
Aluminum Oxide ◽  
Barrier Layer ◽  
Chemical Etching ◽  
Anodic Aluminum Oxide ◽  
Anodic Aluminum ◽  
Oxide Barrier ◽  
Wet Chemical ◽  
Wet Chemical Etching ◽  
Opening Process

Fabrication and characteristics of the high-sensitivity humidity sensor of anodic aluminum oxide based on silicon substrates

2018 ◽  
Vol 32 (16) ◽  
pp. 1850199 ◽  
Author(s):  
Degao Lan ◽  
Xiaofeng Zhao ◽  
Fei Wang ◽  
Chunpeng Ai ◽  
Dianzhong Wen ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Silicon Substrate ◽  
Anodic Aluminum Oxide ◽  
Nonlinear Response ◽  
Humidity Sensor ◽  
High Sensitivity ◽  
Silicon Substrates ◽  
High Porosity ◽  
Interdigitated Electrodes ◽  
Anodic Aluminum

The humidity sensor based on silicon substrate is presented in this paper, which consists of anodic aluminum oxide (AAO) film and interdigitated electrodes. By using electro-chemical oxidizing technique, AAO film with high porosity is fabricated on the silicon substrate. Under optimal oxidization condition, pore diameter of 37–79 nm and depth about [Formula: see text]m is achieved. Interdigitated electrodes are fabricated on the top of AAO film by vacuum evaporation deposition method. The results show that the sensor has different nonlinear response in whole range of relative humidity (RH). Moreover, it has almost linear relationship between the capacitance and RH at high RH from 75% to 95%. The highest sensitivity is obtained 613 pF/%RH at 1 kHz, which is much higher than other frequencies.

Fabrication of Anodic Aluminum Oxide Template and Cu Nanowire Surface Fastener

2013 ◽  
Author(s):  
Hiromasa Teshima ◽  
Kohei Kojima ◽  
Yang Ju
Keyword(s):  
Aluminum Oxide ◽  
Barrier Layer ◽  
Anodic Aluminum Oxide ◽  
Anodic Aluminum Oxide Template ◽  
Aluminum Film ◽  
Surface Mount Technology ◽  
Anodic Aluminum Oxide Membrane ◽  
Anodic Aluminum ◽  
Nanowire Surface ◽  
Oxide Membrane

There is an urgent need in surface mount technology (SMT) for a nontoxic, reusable and low temperature bonding technique which can afford good mechanical support as well as electrical contact. Meanwhile in the nanotechnology, many excellent and unique structure-related properties such as the high mechanical strength, the high conductivity and the adhesion ability of gecko feet have been studied. Our lab proposes a new patterned structure of Au nanowire array named nanowire surface fastener (NSF), which cold bonding for surface mount technology can be realized at room temperature. Then various methods have been developed to fabricate nanowire, such as arc discharge, catalytic CVD growth and template synthesis, and so on. Among these methods, the template method has been widely used for preparing one-dimensional nanostructures such as metals, semiconductors, polymers, and other materials by electrochemical, electroless deposition or sol-gel technique. Especially anodic aluminum oxide template assisted way has attached considerable attention due to its unique structure properties, such as controllable pore diameter, extremely narrow pore size distribution with high densities, high aspect ratios, and ideally cylindrical pore shape. The well arranged porous anodic aluminum oxide membrane is fabricated from aluminum film by two steps zM oxalic acid electrolytes. The anodic aluminum oxide membrane was investigated for features such as pore size, interpore distance, and thickness by 40 V. It is important for fabrication of porous anodic aluminum oxide template to find out elimination of the barrier layer of oxide and the pore extending rate by 0.5 M phosphoric acid. Morphologies of surface of aluminum film between anodization process and the anodic aluminum oxide barrier layer was researched by using atomic force microscope and scanning electron microscope. Results showed that the anodic aluminum oxide having the same diameter of the pore and the well arranged pore array without branching channel was obtained. The diameter of the pore before the pore extending treatment is 42 nm and the diameter of the pore after the pore extending treatment for 30 minutes is 86 nm. It was found that the diameter of the pore increased per 15 nm by the pore extending treatment for 10 minutes. We fabricated the through-hole anodic aluminum oxide template and made Cu nanowire by the template of our own making. By using Cu nanowire, we try to produce nanowire surface fastener and evaluate its properties.

A comparative study of electrochemical barrier layer thinning for anodic aluminum oxide grown on technical purity aluminum

2015 ◽  
Vol 741 ◽  
pp. 80-86 ◽  
Author(s):  
Wojciech J. Stępniowski ◽  
Wioletta Florkiewicz ◽  
Marta Michalska-Domańska ◽  
Małgorzata Norek ◽  
Tomasz Czujko
Keyword(s):  
Aluminum Oxide ◽  
Comparative Study ◽  
Barrier Layer ◽  
Anodic Aluminum Oxide ◽  
Anodic Aluminum

scholarly journals Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate

2007 ◽  
Vol 91 (5) ◽  
pp. 053117 ◽  
Author(s):  
Bo Yan ◽  
Hoa T. M. Pham ◽  
Yue Ma ◽  
Yan Zhuang ◽  
Pasqualina M. Sarro
Keyword(s):  
Aluminum Oxide ◽  
Silicon Substrate ◽  
Anodic Aluminum Oxide ◽  
Oxide Layers ◽  
Anodic Aluminum

The Micro/Nanohybrid Structures Enhancing B35 Cell Guidance on Chitosan

2015 ◽  
Vol 6 (3) ◽  
Author(s):  
Ying-Ting Lin ◽  
Ching-Wen Li ◽  
Gou-Jen Wang
Keyword(s):  
Aluminum Oxide ◽  
Barrier Layer ◽  
Anodic Aluminum Oxide ◽  
Microelectromechanical Systems ◽  
Nerve Cells ◽  
Hybrid Structures ◽  
Chitosan Scaffold ◽  
Anodic Aluminum ◽  
Nickel Electroforming ◽  
Chitosan Scaffolds

A novel chitosan scaffold with micro- and nano-hybrid structures was proposed in this study. The hemispheric array of the barrier layer of an anodic aluminum oxide (AAO) film was used as the substrate. Microelectromechanical systems and nickel electroforming techniques were integrated for fabricating chitosan scaffolds with different micro/nanohybrid structures. Nerve cells were then cultured on the conduits. It was demonstrated that the scaffold with pure microstructures can guide the nerve cells to grow along the ridges of the microstructure and some cells to grow across the groove in between two ridges of the microstructure. It was also shown that the scaffold with microscale ridges and nanopatterns on the groove between two ridges can more effectively guide the cells to grow along the ridges, thus enhancing the proliferation of nerve cells.

Sign in / Sign up

Export Citation Format

Share Document