scholarly journals Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate

2007 ◽  
Vol 91 (5) ◽  
pp. 053117 ◽  
Author(s):  
Bo Yan ◽  
Hoa T. M. Pham ◽  
Yue Ma ◽  
Yan Zhuang ◽  
Pasqualina M. Sarro
Keyword(s):  
Aluminum Oxide ◽  
Silicon Substrate ◽  
Anodic Aluminum Oxide ◽  
Oxide Layers ◽  
Anodic Aluminum

Fabrication and characteristics of the high-sensitivity humidity sensor of anodic aluminum oxide based on silicon substrates

2018 ◽  
Vol 32 (16) ◽  
pp. 1850199 ◽  
Author(s):  
Degao Lan ◽  
Xiaofeng Zhao ◽  
Fei Wang ◽  
Chunpeng Ai ◽  
Dianzhong Wen ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Silicon Substrate ◽  
Anodic Aluminum Oxide ◽  
Nonlinear Response ◽  
Humidity Sensor ◽  
High Sensitivity ◽  
Silicon Substrates ◽  
High Porosity ◽  
Interdigitated Electrodes ◽  
Anodic Aluminum

The humidity sensor based on silicon substrate is presented in this paper, which consists of anodic aluminum oxide (AAO) film and interdigitated electrodes. By using electro-chemical oxidizing technique, AAO film with high porosity is fabricated on the silicon substrate. Under optimal oxidization condition, pore diameter of 37–79 nm and depth about [Formula: see text]m is achieved. Interdigitated electrodes are fabricated on the top of AAO film by vacuum evaporation deposition method. The results show that the sensor has different nonlinear response in whole range of relative humidity (RH). Moreover, it has almost linear relationship between the capacitance and RH at high RH from 75% to 95%. The highest sensitivity is obtained 613 pF/%RH at 1 kHz, which is much higher than other frequencies.

Removal of Anodic Aluminum Oxide Barrier Layer on Silicon Substrate by using Cl2/BCl3 Neutral Beam Etching

2011 ◽  
Vol 158 (5) ◽  
pp. D254 ◽  
Author(s):  
J. K. Yeon ◽  
W. S. Lim ◽  
J. B. Park ◽  
N. Y. Kwon ◽  
S. I. Kim ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Barrier Layer ◽  
Silicon Substrate ◽  
Anodic Aluminum Oxide ◽  
Neutral Beam ◽  
Anodic Aluminum ◽  
Oxide Barrier ◽  
Neutral Beam Etching

In-situ electrochemical doping of nanoporous anodic aluminum oxide with indigo carmine organic dye

2016 ◽  
Vol 598 ◽  
pp. 60-64 ◽  
Author(s):  
Wojciech J. Stępniowski ◽  
Małgorzata Norek ◽  
Bogusław Budner ◽  
Marta Michalska-Domańska ◽  
Agata Nowak-Stępniowska ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Indigo Carmine ◽  
Organic Dye ◽  
Electrochemical Doping ◽  
Anodic Aluminum ◽  
Nanoporous Anodic Aluminum Oxide ◽  
Nanoporous Anodic Aluminum

Preparation of Anodic Aluminum Oxide Nano-Templates on Polycrystalline Silicon Substrates

2013 ◽  
Vol 724-725 ◽  
pp. 63-66
Author(s):  
Guo Feng Ma ◽  
Hong Ling Zhang ◽  
Hong Bo Fu ◽  
Li Na Sun ◽  
Chun Lin He
Keyword(s):  
Aluminum Oxide ◽  
Silicon Substrate ◽  
Polycrystalline Silicon ◽  
Anodic Aluminum Oxide ◽  
Pure Aluminum ◽  
Oxalic Acid Solution ◽  
Average Diameter ◽  
Silicon Substrates ◽  
Anodic Aluminum ◽  
One Step

The anodic aluminum oxide (AAO) templates on polycrystalline silicon substrate are studied for growth of ordered nano-dot arrays in order to fabricate the porous silicon layers. The AAO templates on polycrystalline silicon substrate with pores of average diameter 50nm were successfully prepared by one-step anodization of high pure aluminum layer deposited on polycrystalline silicon in oxalic acid solution. Scanning electron microscopy (SEM) showed that alumina nano-pore arrays were nicely constructed with smooth wall morphologies and well-defined diameters.

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