The Phase Change Effect of Oxygen-Incorporation in GeSbTe Films
2011 ◽
Vol 158
(5)
◽
pp. H471
◽
Keyword(s):
2006 ◽
Vol 24
(4)
◽
pp. 974-977
◽
1982 ◽
Vol 43
(C1)
◽
pp. C1-229-C1-234
◽
2011 ◽
Vol 66
(22)
◽
pp. 5459-5473
◽
The effect of oxygen plasma ashing on the resistance of TiN bottom electrode for phase change memory
2015 ◽
Vol 36
(5)
◽
pp. 056001
◽
Keyword(s):
2007 ◽
Vol 43
(2)
◽
pp. 615-620
◽
Keyword(s):