Surface and Interface Characterization of Sequentially Plasma Activated Silicon, Silicon dioxide and Germanium Wafers for Low Temperature Bonding Applications

2019 ◽  
Vol 33 (4) ◽  
pp. 329-338 ◽  
Author(s):  
Fangfang Zhang ◽  
M.G. Kibria ◽  
Kyle Cormier ◽  
Matiar Howlader
2018 ◽  
Vol 32 (12) ◽  
pp. 12174-12186 ◽  
Author(s):  
Iago Oliveira ◽  
Larissa Gomes ◽  
Elton Franceschi ◽  
Gustavo Borges ◽  
Juliana F. de Conto ◽  
...  

1999 ◽  
Vol 115 (2-3) ◽  
pp. 256-265 ◽  
Author(s):  
Bibo Yan ◽  
Nee Lam Loh ◽  
Yongqing Fu ◽  
Chang Q. Sun ◽  
Peter Hing

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