Structure of Hafnium Silicate Films Formed by Atomic Layer Deposition

2019 ◽  
Vol 25 (6) ◽  
pp. 163-172 ◽  
Author(s):  
Jian Liu ◽  
Xiaohua Wu ◽  
William Lennard ◽  
D. Landheer
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Hafnium Silicate ◽  
Layer Deposition

Modeling and Engineering of Hafnium Silicate (HfSiO) Gate Dielectrics Deposited by Nano-Laminated Atomic-Layer Deposition (NL-ALD)

2019 ◽  
Vol 1 (10) ◽  
pp. 113-123 ◽  
Author(s):  
Vincent S. Chang ◽  
Y.T. Hou ◽  
P.F. Hsu ◽  
P.S. Lim ◽  
L.G. Yao ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Gate Dielectrics ◽  
Atomic Layer ◽  
Hafnium Silicate ◽  
Layer Deposition

Atomic layer deposition of hafnium silicate gate dielectric layers

2007 ◽  
Vol 25 (4) ◽  
pp. 1302-1308 ◽  
Author(s):  
Annelies Delabie ◽  
Geoffrey Pourtois ◽  
Matty Caymax ◽  
Stefan De Gendt ◽  
Lars-Åke Ragnarsson ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Gate Dielectric ◽  
Atomic Layer ◽  
Hafnium Silicate ◽  
Dielectric Layers ◽  
Layer Deposition
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