Characteristics and Cleaning of Dry-Etching-Damaged Layer of Amorphous Oxide Thin-Film Transistor
2009 ◽
Vol 12
(4)
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pp. H95
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2011 ◽
Vol 58
(4)
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pp. 1127-1133
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2014 ◽
Vol 24
(23)
◽
pp. 3482-3487
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2010 ◽
Vol 41
(1)
◽
pp. 1385
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