Characteristics and Cleaning of Dry-Etching-Damaged Layer of Amorphous Oxide Thin-Film Transistor

2009 ◽  
Vol 12 (4) ◽  
pp. H95 ◽  
Author(s):  
Chang-Jung Kim ◽  
Jaechul Park ◽  
Sunil Kim ◽  
Ihun Song ◽  
Sangwook Kim ◽  
...  
2011 ◽  
Vol 58 (4) ◽  
pp. 1127-1133 ◽  
Author(s):  
Dae Woong Kwon ◽  
Jang Hyun Kim ◽  
Ji Soo Chang ◽  
Sang Wan Kim ◽  
Wandong Kim ◽  
...  

2008 ◽  
Vol 93 (19) ◽  
pp. 192107 ◽  
Author(s):  
Kenji Nomura ◽  
Toshio Kamiya ◽  
Hiromichi Ohta ◽  
Masahiro Hirano ◽  
Hideo Hosono

2014 ◽  
Vol 24 (23) ◽  
pp. 3482-3487 ◽  
Author(s):  
Seongpil Chang ◽  
Yun Seon Do ◽  
Jong-Woo Kim ◽  
Bo Yeon Hwang ◽  
Jinnil Choi ◽  
...  

2010 ◽  
Vol 97 (19) ◽  
pp. 193504 ◽  
Author(s):  
Dae Woong Kwon ◽  
Jang Hyun Kim ◽  
Ji Soo Chang ◽  
Sang Wan Kim ◽  
Min-Chul Sun ◽  
...  

2013 ◽  
Vol 102 (5) ◽  
pp. 053506 ◽  
Author(s):  
Satoshi Urakawa ◽  
Shigekazu Tomai ◽  
Yoshihiro Ueoka ◽  
Haruka Yamazaki ◽  
Masashi Kasami ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document