Growth Behavior of Atomic-Layer-Deposited Pb(Zr,Ti)O[sub x] Thin Films on Planar Substrate and Three-Dimensional Hole Structures

2008 ◽  
Vol 155 (11) ◽  
pp. D715 ◽  
Author(s):  
Takayuki Watanabe ◽  
Susanne Hoffmann-Eifert ◽  
Cheol Seong Hwang ◽  
Rainer Waser
Keyword(s):  
Thin Films ◽  
Three Dimensional ◽  
Atomic Layer ◽  
Growth Behavior ◽  
Planar Substrate

Unusual Growth Behavior of Atomic Layer Deposited PbTiO3 Thin Films Using Water and Ozone As Oxygen Sources and Their Combination

2010 ◽  
Vol 114 (29) ◽  
pp. 12736-12741 ◽  
Author(s):  
Hyun Ju Lee ◽  
Min Hyuk Park ◽  
Yo-Sep Min ◽  
Guylhaine Clavel ◽  
Nicola Pinna ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Growth Behavior

scholarly journals Atomic Layer Deposition of Superconducting CuO Thin Films on Three-Dimensional Substrates

Crystals ◽  
2020 ◽  
Vol 10 (8) ◽  
pp. 650
Author(s):  
Aile Tamm ◽  
Aivar Tarre ◽  
Valeriy Verchenko ◽  
Helina Seemen ◽  
Raivo Stern
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Ion Beam ◽  
Three Dimensional ◽  
Atomic Layer ◽  
Deposition Process ◽  
Critical Temperatures ◽  
Organic Precursor ◽  
X Ray ◽  
Layer Deposition

In previous decades, investigation of superconductors was aimed either at finding materials with higher critical temperatures or at discovering nontypical superconducting behavior. Here, we present the cupric (CuO) thin films, which were synthesized by atomic layer deposition by using a metal-organic precursor, copper (II)-bis-(-dimethylamino-2-propoxide), and ozone as an oxidizer. The deposition process was optimized by employing a quartz crystal monitoring, and the contact between the deposited films and planar and three-dimensional SiO2/Si substrates was examined by scanning electron microscopy with a focused ion beam module. Phase and elemental composition were analyzed by X-ray diffraction and X-ray fluorescence. Two-probe electrical resistivity measurements revealed a resistivity drop below the critical temperature of 4 K, which may indicate low-temperature superconductivity of the CuO thin films.

scholarly journals Organic and inorganic–organic thin film structures by molecular layer deposition: A review

2014 ◽  
Vol 5 ◽  
pp. 1104-1136 ◽  
Author(s):  
Pia Sundberg ◽  
Maarit Karppinen
Keyword(s):  
Thin Films ◽  
Hybrid Materials ◽  
Molecular Layer ◽  
Three Dimensional ◽  
Atomic Layer ◽  
Great Promise ◽  
Organic Thin Film ◽  
Molecular Layer Deposition ◽  
Composition Control ◽  
Layer Deposition

The possibility to deposit purely organic and hybrid inorganic–organic materials in a way parallel to the state-of-the-art gas-phase deposition method of inorganic thin films, i.e., atomic layer deposition (ALD), is currently experiencing a strongly growing interest. Like ALD in case of the inorganics, the emerging molecular layer deposition (MLD) technique for organic constituents can be employed to fabricate high-quality thin films and coatings with thickness and composition control on the molecular scale, even on complex three-dimensional structures. Moreover, by combining the two techniques, ALD and MLD, fundamentally new types of inorganic–organic hybrid materials can be produced. In this review article, we first describe the basic concepts regarding the MLD and ALD/MLD processes, followed by a comprehensive review of the various precursors and precursor pairs so far employed in these processes. Finally, we discuss the first proof-of-concept experiments in which the newly developed MLD and ALD/MLD processes are exploited to fabricate novel multilayer and nanostructure architectures by combining different inorganic, organic and hybrid material layers into on-demand designed mixtures, superlattices and nanolaminates, and employing new innovative nanotemplates or post-deposition treatments to, e.g., selectively decompose parts of the structure. Such layer-engineered and/or nanostructured hybrid materials with exciting combinations of functional properties hold great promise for high-end technological applications.

Atomic-Layer-Deposited MoNx Thin Films on Three-Dimensional Ni Foam as Efficient Catalysts for the Electrochemical Hydrogen Evolution Reaction

2019 ◽  
Vol 11 (19) ◽  
pp. 17321-17332 ◽  
Author(s):  
Rahul Ramesh ◽  
Dip K. Nandi ◽  
Tae Hyun Kim ◽  
Taehoon Cheon ◽  
Jihun Oh ◽  
...  
Keyword(s):  
Thin Films ◽  
Hydrogen Evolution ◽  
Hydrogen Evolution Reaction ◽  
Three Dimensional ◽  
Atomic Layer ◽  
Ni Foam

Substrate Effects on the Growth Behavior of Atomic-Layer-Deposited Ru Thin Films Using RuO4 Precursor and N2/H2 Mixed Gas

2019 ◽  
Vol 123 (36) ◽  
pp. 22539-22549 ◽  
Author(s):  
Cheol Hyun An ◽  
Woojin Jeon ◽  
Sang Hyeon Kim ◽  
Cheol Jin Cho ◽  
Dae Seon Kwon ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Growth Behavior ◽  
Mixed Gas ◽  
Substrate Effects

Aging Effects of As-deposited and Passivated Cobalt Slanted Columnar Thin Films

2012 ◽  
Vol 1409 ◽  
Author(s):  
Daniel Schmidt ◽  
Eva Schubert ◽  
Mathias Schubert
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Three Dimensional ◽  
Atomic Layer ◽  
Deposition Process ◽  
Visible Spectral Region ◽  
Metal Nanostructures ◽  
Aging Effects ◽  
Layer Deposition ◽  
Oxidation In Air

ABSTRACTAging effects of as-deposited and passivated slanted columnar thin films from cobalt determined by generalized ellipsometry within the visible spectral region are reported. Slanted columnar thin films have been grown by glancing angle electron beam deposition and sub-sequently coated with Al2O3 by an atomic layer deposition process. An anisotropic Bruggeman effective medium approximation developed for highly ordered three dimensional metal nanostructures is employed to analyze spectroscopic Mueller matrix ellipsometry data. Our model approach allows for determination of biaxial optical and structural properties as well as fractions of multiple film constituents. While the optical properties of the uncoated film change over time, the alumina passivation layer prevents oxidation in air and therefore aging effects; however, it affects the intrinsic bulk-like Co optical properties.

Vector Magneto-Optical Generalized Ellipsometry on Passivated Permalloy Slanted Columnar Thin Films

2012 ◽  
Vol 1408 ◽  
Author(s):  
Daniel Schmidt ◽  
Chad Briley ◽  
Eva Schubert ◽  
Mathias Schubert
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Three Dimensional ◽  
Hysteresis Loops ◽  
Magnetic Behavior ◽  
Atomic Layer ◽  
Optical Coupling ◽  
Nanostructured Thin Film ◽  
Coupling Parameters ◽  
Columnar Thin Film

ABSTRACTVector magneto-optical generalized ellipsometry on passivated ferromagnetic permalloy slanted columnar thin films is reported. The nanostructured thin film was grown by electron-beam glancing angle deposition and subsequently coated with a thin Al2O3 layer by atomic layer deposition. Magneto-optical generalized ellipsometry data have been acquired while an external magnetic field H with constant amplitude was rotated with respect to the sample (spatial hysteresis loops). The magneto-optical coupling parameters, which are proportional to the sample magnetization M, reveal intriguing anisotropic magnetic behavior of the slanted columnar thin film. Three-dimensional graphs of the magneto-optical coupling parameters with respect to spatial hysteresis loops shown here are representative for the sample magnetization.

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