Etching Characteristics and Surface Morphology of Nitrogen-Doped a-SiC Films Prepared by RF Magnetron Sputtering

2019 ◽  
Vol 14 (1) ◽  
pp. 375-384 ◽  
Author(s):  
Mariana A. Fraga ◽  
Rodrigo S. Pessoa ◽  
Ivo C. Oliveira ◽  
Marcos Massi ◽  
Homero S. Maciel ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Nitrogen Doped ◽  
Sic Films

Comparison between the Piezoresistive Properties of a-SiC Films Obtained by PECVD and Magnetron Sputtering

2011 ◽  
Vol 679-680 ◽  
pp. 217-220 ◽  
Author(s):  
Mariana A. Fraga
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Magnetron Sputtering ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Rf Magnetron Sputtering ◽  
Strain Gauges ◽  
Beam Bending ◽  
Lift Off ◽  
Sic Films

This work compares the piezoresistive properties of SiC thin films produced by two techniques enhanced by plasma, PECVD (plasma enhanced chemical vapor deposition) and RF magnetron sputtering. In order to study these properties, strain gauges based on SiC films produced were fabricated using photolithography techniques in conjunction with lift-off processes. The beam-bending method was used to characterize the SiC strain gauges fabricated.

Effect of Annealing on the Surface Morphology and Current–Voltage Characterization of a CZO Structure Prepared by RF Magnetron Sputtering

2021 ◽  
Vol 55 (1) ◽  
pp. 28-36
Author(s):  
B. Kınacı ◽  
E. Çelik ◽  
E. Çokduygulular ◽  
Ç. Çetinkaya ◽  
Y. Yalçın ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Current Voltage

scholarly journals Al-Doping Effect on the Surface Morphology of ZnO Films Grown by Reactive RF Magnetron Sputtering

2013 ◽  
Vol 04 (12) ◽  
pp. 761-767 ◽  
Author(s):  
Erica Pereira da Silva ◽  
Michel Chaves ◽  
Gilvan Junior da Silva ◽  
Larissa Baldo de Arruda ◽  
Paulo Noronha Lisboa-Filho ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Doping Effect ◽  
Zno Films ◽  
Al Doping ◽  
Reactive Rf Magnetron Sputtering

Effect of power variation on microstructure and surface morphology of HgCdTe films deposited by RF magnetron sputtering

2010 ◽  
Vol 31 (5) ◽  
pp. 053004 ◽  
Author(s):  
Wang Guanghua ◽  
Kong Jincheng ◽  
Li Xiongjun ◽  
Qiu Feng ◽  
Li Cong ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Power Variation

Surface morphology of α-SIC coatings deposited by RF magnetron sputtering

2005 ◽  
Vol 197 (2-3) ◽  
pp. 161-167 ◽  
Author(s):  
Huidong Tang ◽  
Shouhong Tan ◽  
Zhengren Huang ◽  
Shaoming Dong ◽  
Dongliang Jiang
Keyword(s):  
Surface Morphology ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Sic Coatings
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