Enabling Effective Work Function Tuning by RF-PVD Metal Oxide on High-k Gate Dielectric

2019 ◽  
Vol 13 (1) ◽  
pp. 143-150 ◽  
Author(s):  
Naomi Yoshida ◽  
Xianmin Tang ◽  
Khaled Ahmed ◽  
Giuseppina Conti ◽  
Dave Liu ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Work Function ◽  
Gate Dielectric ◽  
Effective Work ◽  
Effective Work Function ◽  
High K ◽  
Work Function Tuning ◽  
High K Gate Dielectric

An effective work-function tuning method of nMOSCAP with high-k/metal gate by TiN/TaN double-layer stack thickness

2014 ◽  
Vol 35 (9) ◽  
pp. 096001 ◽  
Author(s):  
Xueli Ma ◽  
Hong Yang ◽  
Wenwu Wang ◽  
Huaxiang Yin ◽  
Huilong Zhu ◽  
...  
Keyword(s):  
Work Function ◽  
Double Layer ◽  
Metal Gate ◽  
Effective Work ◽  
Effective Work Function ◽  
Tuning Method ◽  
High K ◽  
Work Function Tuning

Effective work function modulation of SWCNT–AZO NP hybrid electrodes in fully solution-processed flexible metal-oxide thin film transistors

2015 ◽  
Vol 3 (31) ◽  
pp. 8121-8126 ◽  
Author(s):  
Su Jeong Lee ◽  
Jieun Ko ◽  
Jee Ho Park ◽  
Jung Han Kim ◽  
Gee Sung Chae ◽  
...  
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Work Function ◽  
Thin Film Transistors ◽  
Oxide Thin Film ◽  
Schematic Diagram ◽  
Effective Work ◽  
Effective Work Function ◽  
Metal Oxide Thin Film ◽  
Flexible Metal

Schematic diagram of an SWCNT–AZO NP hybrid electrode TFT and the optical image of the TFT with the SWCNT/AZO NP hybrid electrodes on a PI substrate.

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