Influence of Phase Separation on Electrical Properties of ALD Hf–Silicate Films with Various Si Concentrations
2008 ◽
Vol 11
(5)
◽
pp. H121
◽
2009 ◽
Vol 206
(7)
◽
pp. 1465-1470
◽
Keyword(s):
Keyword(s):
Keyword(s):