A Technique for Fabricating Uniform Double-Sided Porous Silicon Wafers

2007 ◽  
Vol 10 (11) ◽  
pp. D130 ◽  
Author(s):  
T. D. James ◽  
A. J. Keating ◽  
G. Parish ◽  
L. Faraone ◽  
C. A. Musca
Optik ◽  
2020 ◽  
Vol 201 ◽  
pp. 163486
Author(s):  
Furu Zhong ◽  
Jiaqing Mo ◽  
Yangjun Li ◽  
Bin Sun ◽  
Zhaofeng Wu

2003 ◽  
Vol 197 (2) ◽  
pp. 331-335 ◽  
Author(s):  
S. H. C. Anderson ◽  
H. Elliott ◽  
D. J. Wallis ◽  
L. T. Canham ◽  
J. J. Powell

MRS Advances ◽  
2016 ◽  
Vol 1 (48) ◽  
pp. 3235-3246 ◽  
Author(s):  
Twan Bearda ◽  
Ivan Gordon ◽  
Hariharsudan Sivaramakrishnan Radhakrishnan ◽  
Valérie Depauw ◽  
Kris Van Nieuwenhuysen ◽  
...  

ABSTRACTIn order to reduce the material cost for silicon solar cells, several research groups are investigating methods to minimize the silicon consumption for making monocrystalline silicon wafers. One promising approach is deposition of an epitaxial layer on porous silicon, followed by detachment of the layer. This contribution discusses improvements in the epitaxial wafer fabrication by optimization of the porosification process. The introduction of a layered porous silicon structure allows to independently improve both epitaxial layer quality and detachment yield. In this way, we have managed to obtain 100µm thick silicon wafers with effective lifetimes up to 1.3ms, and 40µm thick wafers with effective lifetimes up to 700µs. We will also review the current status of the process development for solar cells made on thin wafers. Two approaches are presented. In the first approach, heterojunction solar cells are fabricated on freestanding epitaxial wafers of 40µm thickness. In the second approach, high efficiency (21%) heterojunction back-contacted cells are fabricated on wafers that are bonded to a glass superstrate. Challenges for device processing and limitations in cell performance are discussed.


Lab on a Chip ◽  
2014 ◽  
Vol 14 (12) ◽  
pp. 2081-2089 ◽  
Author(s):  
Sara Azimi ◽  
Zhiya Dang ◽  
Ce Zhang ◽  
Jiao Song ◽  
Mark B. H. Breese ◽  
...  

We present a new process to fabricate buried arrays of 3D nanochannels in glass using ion irradiation, anodization and oxidation of silicon wafers.


1993 ◽  
Vol 316 ◽  
Author(s):  
Lianwei Wang ◽  
Chenglu Lin ◽  
Ping Liu ◽  
Zuyao Zhou ◽  
Shichang Zou

Abstract:The effect of ion implantation on the formation and light emitting properties of porous silicon is reported. Si + , F+ ions were implanted into silicon wafers before electrochemical etching process. The experiments showed that porous structure can be formed on the wafer containing amorphous layer, while the porosity distribution with the depth changed greatly compared with the anodized crystalline Si. The implantation of F+ ions greatly affects the formation mechanism. The creation of point defects leads to red-shift in photoluminescence measurements.


2014 ◽  
Vol 806 ◽  
pp. 109-113
Author(s):  
G.J. Blayney ◽  
C. Zaradzki ◽  
Y. Liu ◽  
M.A. Mohd-Azmi ◽  
Owen J. Guy

Silicon photovoltaic cells require anti-reflection treatments in order to minimise optical losses and improve cell efficiencies. Commercially, the silicon surface is textured using a chemical etchant followed by the addition of an anti-reflective coating to further suppress reflectivity. We present a process using metal assisted etching to create porous silicon features capable of reducing reflectivity to less than 5%. A method for producing porous silicon using Substrate Conformal Imprint Lithography (SCIL) has been developed in order to pattern the nanoscale anti-reflective structures onto silicon wafers.


2015 ◽  
Vol 204 ◽  
pp. 251-256 ◽  
Author(s):  
Hangzhou Xu ◽  
Hongdi Xiao ◽  
Haiyan Pei ◽  
Jishi Cui ◽  
Wenrong Hu

2017 ◽  
Vol 7 (2) ◽  
pp. 430-436 ◽  
Author(s):  
Catherin Gemmel ◽  
Jan Hensen ◽  
Sarah Kajari-Schroder ◽  
Rolf Brendel

2017 ◽  
Vol 19 (3) ◽  
pp. 75-84
Author(s):  
E.V. Berlova ◽  
V.A. Zhukova ◽  
N.V. Latukhina ◽  
G.A. Pisarenko

The results of experimental studies of porous silicon nanocomposites with biological materials: powder mineral phase of bone (hydroxyapatite) and biochemical solution identical to the natural tear fluid are presented in the work. Layers of porous silicon have been obtained in the process of electrochemical etching silicon wafers. There have been studies of IR reflection spectra of samples of nanocomposites in the range 4000-550 cm-1 produced.


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