Buried centimeter-long micro- and nanochannel arrays in porous silicon and glass

Lab on a Chip ◽  
2014 ◽  
Vol 14 (12) ◽  
pp. 2081-2089 ◽  
Author(s):  
Sara Azimi ◽  
Zhiya Dang ◽  
Ce Zhang ◽  
Jiao Song ◽  
Mark B. H. Breese ◽  
...  
Keyword(s):  
Porous Silicon ◽  
Ion Irradiation ◽  
Silicon Wafers ◽  
New Process ◽  
Nanochannel Arrays

We present a new process to fabricate buried arrays of 3D nanochannels in glass using ion irradiation, anodization and oxidation of silicon wafers.

Optical characteristics of porous silicon photonic crystals prepared on the back surface of silicon wafers

Optik ◽  
2020 ◽  
Vol 201 ◽  
pp. 163486
Author(s):  
Furu Zhong ◽  
Jiaqing Mo ◽  
Yangjun Li ◽  
Bin Sun ◽  
Zhaofeng Wu
Keyword(s):  
Porous Silicon ◽  
Photonic Crystals ◽  
Silicon Wafers ◽  
Optical Characteristics ◽  
Back Surface ◽  
Silicon Photonic

Cathodoluminescence and photoluminescence of swift ion irradiation modified zinc oxide-porous silicon nanocomposite

2012 ◽  
Vol 177 (16) ◽  
pp. 1476-1481 ◽  
Author(s):  
Yogesh Kumar ◽  
Manuel Herrera ◽  
Fouran Singh ◽  
S.F. Olive-Méndez ◽  
D. Kanjilal ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Porous Silicon ◽  
Ion Irradiation

Fabrication of patterned porous silicon using high-energy ion irradiation

2006 ◽  
Vol 13 (3-4) ◽  
pp. 259-261 ◽  
Author(s):  
E. J. Teo ◽  
M. B. H. Breese ◽  
A. A. Bettiol ◽  
F. J. T. Champeaux ◽  
F. Watt ◽  
...  
Keyword(s):  
Porous Silicon ◽  
Ion Irradiation ◽  
High Energy

Dissolution of different forms of partially porous silicon wafers under simulated physiological conditions

2003 ◽  
Vol 197 (2) ◽  
pp. 331-335 ◽  
Author(s):  
S. H. C. Anderson ◽  
H. Elliott ◽  
D. J. Wallis ◽  
L. T. Canham ◽  
J. J. Powell
Keyword(s):  
Porous Silicon ◽  
Silicon Wafers ◽  
Physiological Conditions

Thin Epitaxial Silicon Foils Using Porous-Silicon-Based Lift-Off for Photovoltaic Application

MRS Advances ◽  
2016 ◽  
Vol 1 (48) ◽  
pp. 3235-3246 ◽  
Author(s):  
Twan Bearda ◽  
Ivan Gordon ◽  
Hariharsudan Sivaramakrishnan Radhakrishnan ◽  
Valérie Depauw ◽  
Kris Van Nieuwenhuysen ◽  
...  
Keyword(s):  
Solar Cells ◽  
Porous Silicon ◽  
Epitaxial Layer ◽  
High Efficiency ◽  
Process Development ◽  
Silicon Wafers ◽  
Current Status ◽  
Epitaxial Silicon ◽  
Heterojunction Solar Cells ◽  
Lift Off

ABSTRACTIn order to reduce the material cost for silicon solar cells, several research groups are investigating methods to minimize the silicon consumption for making monocrystalline silicon wafers. One promising approach is deposition of an epitaxial layer on porous silicon, followed by detachment of the layer. This contribution discusses improvements in the epitaxial wafer fabrication by optimization of the porosification process. The introduction of a layered porous silicon structure allows to independently improve both epitaxial layer quality and detachment yield. In this way, we have managed to obtain 100µm thick silicon wafers with effective lifetimes up to 1.3ms, and 40µm thick wafers with effective lifetimes up to 700µs. We will also review the current status of the process development for solar cells made on thin wafers. Two approaches are presented. In the first approach, heterojunction solar cells are fabricated on freestanding epitaxial wafers of 40µm thickness. In the second approach, high efficiency (21%) heterojunction back-contacted cells are fabricated on wafers that are bonded to a glass superstrate. Challenges for device processing and limitations in cell performance are discussed.

The modification of the properties of n-type conductivity porous silicon by argon ion irradiation

Vacuum ◽  
2004 ◽  
Vol 73 (1) ◽  
pp. 105-108 ◽  
Author(s):  
B.M. Kostishko ◽  
Yu.S. Nagornov ◽  
S.V. Appolonov
Keyword(s):  
Porous Silicon ◽  
Ion Irradiation ◽  
Type Conductivity ◽  
Argon Ion

The effects of ion irradiation on porous silicon photoluminescence

2005 ◽  
Vol 97 (3) ◽  
pp. 033528 ◽  
Author(s):  
L. G. Jacobsohn ◽  
B. L. Bennett ◽  
D. W. Cooke ◽  
R. E. Muenchausen ◽  
M. Nastasi
Keyword(s):  
Porous Silicon ◽  
Ion Irradiation

A thousand-fold enhancement of photoluminescence in porous silicon using ion irradiation

2013 ◽  
Vol 114 (5) ◽  
pp. 053517 ◽  
Author(s):  
S. Azimi ◽  
J. Song ◽  
Z. Y. Dang ◽  
M. B. H. Breese
Keyword(s):  
Porous Silicon ◽  
Ion Irradiation

Porous silicon microcavities fabricated using ion irradiation

2007 ◽  
Vol 260 (1) ◽  
pp. 445-449 ◽  
Author(s):  
D. Mangaiyarkarasi ◽  
M.B.H. Breese ◽  
O.Y. Sheng ◽  
D.J. Blackwood
Keyword(s):  
Porous Silicon ◽  
Ion Irradiation

A Technique for Fabricating Uniform Double-Sided Porous Silicon Wafers

2007 ◽  
Vol 10 (11) ◽  
pp. D130 ◽  
Author(s):  
T. D. James ◽  
A. J. Keating ◽  
G. Parish ◽  
L. Faraone ◽  
C. A. Musca
Keyword(s):  
Porous Silicon ◽  
Silicon Wafers
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