High Density Inductively Coupled Plasma Etching of Zinc-Oxide(ZnO) and Indium-Zinc Oxide(IZO)

2019 ◽  
Vol 6 (2) ◽  
pp. 239-247
Author(s):  
Wantae Lim ◽  
Luc Stafford ◽  
Brent Gila ◽  
David Norton ◽  
Steve Pearton ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
High Density ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Indium Zinc Oxide

Inductively coupled plasma etching of hafnium–indium–zinc oxide using chlorine based gas mixtures

2014 ◽  
Vol 53 (4) ◽  
pp. 046503
Author(s):  
Yong-Hee Choi ◽  
Ho-Kyun Jang ◽  
Jun-Eon Jin ◽  
Min-Kyu Joo ◽  
Mingxing Piao ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Gas Mixtures ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Indium Zinc Oxide

Using Ni masks in inductively coupled plasma etching of high density hole patterns in GaN

2005 ◽  
Vol 23 (4) ◽  
pp. 1611 ◽  
Author(s):  
David S. Y. Hsu ◽  
Chul Soo Kim ◽  
Charles R. Eddy ◽  
Ronald T. Holm ◽  
Richard L. Henry ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
High Density ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled
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