Epitaxial Deposition of Silicon in a Hot-Tube Furnace
1962 ◽
Vol 109
(6)
◽
pp. 514
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2012 ◽
Vol 97
◽
pp. 29-38
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2007 ◽
Vol 336-338
◽
pp. 505-508
Keyword(s):
2013 ◽
Vol 15
(3)
◽
pp. 219-231
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