Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing and Its Application to Low Temperature poly-Si Thin Film Transistors

2019 ◽  
Vol 3 (8) ◽  
pp. 173-178
Author(s):  
Yuta Sugawara ◽  
Y. Uraoka ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Takashi Fuyuki ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Laser Annealing ◽  
Green Laser ◽  
Silicon Thin Films ◽  
Si Thin Film

Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing for High-Performance Thin-Film Transistors

2007 ◽  
Vol 28 (5) ◽  
pp. 395-397 ◽  
Author(s):  
Yuta Sugawara ◽  
Yukiharu Uraoka ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Takashi Fuyuki ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thin Film Transistors ◽  
High Performance ◽  
Laser Annealing ◽  
Green Laser ◽  
Silicon Thin Films

Development of line-shaped optical system for green laser annealing used in the manufacture of low-temperature poly-Si thin-film transistors

2006 ◽  
Vol 45 (19) ◽  
pp. 4709 ◽  
Author(s):  
Tatsuki Okamoto ◽  
Kazutoshi Morikawa ◽  
Atsuhiro Sono ◽  
Yukio Sato ◽  
Junichi Nishimae
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Optical System ◽  
Thin Film Transistors ◽  
Laser Annealing ◽  
Green Laser ◽  
Si Thin Film

Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing

2007 ◽  
Vol 46 (No. 8) ◽  
pp. L164-L166 ◽  
Author(s):  
Yuta Sugawara ◽  
Yukiharu Uraoka ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Takashi Fuyuki ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Annealing ◽  
Green Laser ◽  
Silicon Thin Films
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