Development of line-shaped optical system for green laser annealing used in the manufacture of low-temperature poly-Si thin-film transistors

2006 ◽  
Vol 45 (19) ◽  
pp. 4709 ◽  
Author(s):  
Tatsuki Okamoto ◽  
Kazutoshi Morikawa ◽  
Atsuhiro Sono ◽  
Yukio Sato ◽  
Junichi Nishimae
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Optical System ◽  
Thin Film Transistors ◽  
Laser Annealing ◽  
Green Laser ◽  
Si Thin Film

Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing and Its Application to Low Temperature poly-Si Thin Film Transistors

2019 ◽  
Vol 3 (8) ◽  
pp. 173-178
Author(s):  
Yuta Sugawara ◽  
Y. Uraoka ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Takashi Fuyuki ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Laser Annealing ◽  
Green Laser ◽  
Silicon Thin Films ◽  
Si Thin Film

Peripheral circuit designs using low-temperature p-type poly-Si thin-film transistors

2006 ◽  
Vol 14 (4) ◽  
pp. 403 ◽  
Author(s):  
Woo-Jin Nam ◽  
Jae-Hoon Lee ◽  
Hye-Jin Lee ◽  
Hee-Sun Shin ◽  
Min-Koo Han
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
P Type ◽  
Si Thin Film

Characterisation of low temperature poly-Si thin film transistors

1991 ◽  
Vol 34 (7) ◽  
pp. 671-679 ◽  
Author(s):  
S.D. Brotherton ◽  
J.R. Ayres ◽  
N.D. Young
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Si Thin Film

Reliability of Low-Temperature Poly-Si Thin-Film Transistors

2003 ◽  
Vol 93 ◽  
pp. 43-48
Author(s):  
Y. Inoue ◽  
H. Ogawa ◽  
Takeshi Endo ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Si Thin Film
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